10/23/2010	3:00:46 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/23/2010	3:00:47 PM	Recipe started at 3:00 PM
10/23/2010	3:00:47 PM	H2 valve closed
10/23/2010	3:00:47 PM	BCl3 valve closed
10/23/2010	3:00:47 PM	PH3 valve closed
10/23/2010	3:00:47 PM	SiCl4 pre valve closed
10/23/2010	3:00:47 PM	SiCl4 post valve closed
10/23/2010	3:00:47 PM	Main Vac valve closed
10/23/2010	3:00:47 PM	Bypass valve closed
10/23/2010	3:00:47 PM	Bubbler valve closed
10/23/2010	3:00:47 PM	Helium valve opened
10/23/2010	3:00:47 PM	Helium MFC set to  500.000000
10/23/2010	3:00:47 PM	H2 MFC set to  0.000000
10/23/2010	3:00:47 PM	BCl3 MFC set to  0.000000
10/23/2010	3:00:47 PM	PHl3 MFC set to  0.000000
10/23/2010	3:00:47 PM	SiCl4 MFC set to  0.000000
10/23/2010	3:00:47 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	3:00:47 PM	Tube furnace set to 0
10/23/2010	3:02:07 PM	Helium valve closed
10/23/2010	3:02:07 PM	H2 valve closed
10/23/2010	3:02:07 PM	BCl3 valve closed
10/23/2010	3:02:07 PM	PH3 valve closed
10/23/2010	3:02:07 PM	SiCl4 pre valve closed
10/23/2010	3:02:07 PM	SiCl4 post valve closed
10/23/2010	3:02:07 PM	Main Vac valve closed
10/23/2010	3:02:07 PM	Bypass valve closed
10/23/2010	3:02:07 PM	Bubbler valve closed
10/23/2010	3:02:07 PM	Helium MFC set to  0.000000
10/23/2010	3:02:07 PM	H2 MFC set to  0.000000
10/23/2010	3:02:07 PM	BCl3 MFC set to  0.000000
10/23/2010	3:02:07 PM	PHl3 MFC set to  0.000000
10/23/2010	3:02:07 PM	SiCl4 MFC set to  0.000000
10/23/2010	3:02:07 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	3:02:07 PM	Tube furnace set to 0
10/23/2010	3:02:07 PM	Run finished at 3:02 PM
10/23/2010	3:02:07 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/23/2010	3:17:06 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/23/2010	3:17:06 PM	Recipe started at 3:17 PM
10/23/2010	3:17:06 PM	Helium valve closed
10/23/2010	3:17:06 PM	H2 valve closed
10/23/2010	3:17:06 PM	BCl3 valve closed
10/23/2010	3:17:06 PM	PH3 valve closed
10/23/2010	3:17:06 PM	SiCl4 pre valve closed
10/23/2010	3:17:06 PM	SiCl4 post valve closed
10/23/2010	3:17:06 PM	Main Vac valve closed
10/23/2010	3:17:06 PM	Bubbler valve closed
10/23/2010	3:17:06 PM	Bypass valve opened
10/23/2010	3:17:06 PM	Helium MFC set to  0.000000
10/23/2010	3:17:06 PM	H2 MFC set to  0.000000
10/23/2010	3:17:06 PM	BCl3 MFC set to  0.000000
10/23/2010	3:17:06 PM	PHl3 MFC set to  0.000000
10/23/2010	3:17:06 PM	SiCl4 MFC set to  0.000000
10/23/2010	3:17:06 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	3:17:07 PM	Tube furnace set to 0
10/23/2010	3:17:55 PM	Helium valve closed
10/23/2010	3:17:55 PM	H2 valve closed
10/23/2010	3:17:55 PM	BCl3 valve closed
10/23/2010	3:17:55 PM	PH3 valve closed
10/23/2010	3:17:55 PM	SiCl4 pre valve closed
10/23/2010	3:17:55 PM	SiCl4 post valve closed
10/23/2010	3:17:55 PM	Bubbler valve closed
10/23/2010	3:17:55 PM	Main Vac valve opened
10/23/2010	3:17:55 PM	Bypass valve opened
10/23/2010	3:17:55 PM	Helium MFC set to  0.000000
10/23/2010	3:17:55 PM	H2 MFC set to  0.000000
10/23/2010	3:17:55 PM	BCl3 MFC set to  0.000000
10/23/2010	3:17:55 PM	PHl3 MFC set to  0.000000
10/23/2010	3:17:55 PM	SiCl4 MFC set to  0.000000
10/23/2010	3:17:55 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	3:17:55 PM	Tube furnace set to 0
10/23/2010	3:17:55 PM	Run finished at 3:17 PM
10/23/2010	3:17:55 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/23/2010	3:32:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/23/2010	3:32:40 PM	Recipe started at 3:32 PM
10/23/2010	3:32:40 PM	Helium valve closed
10/23/2010	3:32:40 PM	H2 valve closed
10/23/2010	3:32:40 PM	BCl3 valve closed
10/23/2010	3:32:40 PM	PH3 valve closed
10/23/2010	3:32:40 PM	SiCl4 pre valve closed
10/23/2010	3:32:40 PM	SiCl4 post valve closed
10/23/2010	3:32:40 PM	Main Vac valve closed
10/23/2010	3:32:40 PM	Bubbler valve closed
10/23/2010	3:32:40 PM	Bypass valve opened
10/23/2010	3:32:40 PM	Helium MFC set to  0.000000
10/23/2010	3:32:40 PM	H2 MFC set to  0.000000
10/23/2010	3:32:40 PM	BCl3 MFC set to  0.000000
10/23/2010	3:32:40 PM	PHl3 MFC set to  0.000000
10/23/2010	3:32:40 PM	SiCl4 MFC set to  0.000000
10/23/2010	3:32:40 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	3:32:40 PM	Tube furnace set to 0
10/23/2010	3:32:41 PM	Helium valve closed
10/23/2010	3:32:41 PM	H2 valve closed
10/23/2010	3:32:41 PM	BCl3 valve closed
10/23/2010	3:32:41 PM	PH3 valve closed
10/23/2010	3:32:41 PM	SiCl4 pre valve closed
10/23/2010	3:32:41 PM	SiCl4 post valve closed
10/23/2010	3:32:41 PM	Bubbler valve closed
10/23/2010	3:32:41 PM	Main Vac valve opened
10/23/2010	3:32:41 PM	Bypass valve opened
10/23/2010	3:32:41 PM	Helium MFC set to  0.000000
10/23/2010	3:32:41 PM	H2 MFC set to  0.000000
10/23/2010	3:32:41 PM	BCl3 MFC set to  0.000000
10/23/2010	3:32:41 PM	PHl3 MFC set to  0.000000
10/23/2010	3:32:41 PM	SiCl4 MFC set to  0.000000
10/23/2010	3:32:41 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	3:32:41 PM	Tube furnace set to 0
10/23/2010	3:33:41 PM	H2 valve closed
10/23/2010	3:33:41 PM	BCl3 valve closed
10/23/2010	3:33:41 PM	PH3 valve closed
10/23/2010	3:33:41 PM	SiCl4 pre valve closed
10/23/2010	3:33:41 PM	SiCl4 post valve closed
10/23/2010	3:33:41 PM	Bubbler valve closed
10/23/2010	3:33:41 PM	Helium valve opened
10/23/2010	3:33:41 PM	Main Vac valve opened
10/23/2010	3:33:41 PM	Bypass valve opened
10/23/2010	3:33:41 PM	Helium MFC set to  100.000000
10/23/2010	3:33:41 PM	H2 MFC set to  0.000000
10/23/2010	3:33:41 PM	BCl3 MFC set to  0.000000
10/23/2010	3:33:41 PM	PHl3 MFC set to  0.000000
10/23/2010	3:33:41 PM	SiCl4 MFC set to  0.000000
10/23/2010	3:33:41 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	3:33:41 PM	Tube furnace set to 0
10/23/2010	3:34:41 PM	Helium valve closed
10/23/2010	3:34:41 PM	H2 valve closed
10/23/2010	3:34:41 PM	BCl3 valve closed
10/23/2010	3:34:41 PM	PH3 valve closed
10/23/2010	3:34:41 PM	SiCl4 pre valve closed
10/23/2010	3:34:41 PM	SiCl4 post valve closed
10/23/2010	3:34:41 PM	Bubbler valve closed
10/23/2010	3:34:41 PM	Main Vac valve opened
10/23/2010	3:34:41 PM	Bypass valve opened
10/23/2010	3:34:41 PM	Helium MFC set to  0.000000
10/23/2010	3:34:41 PM	H2 MFC set to  0.000000
10/23/2010	3:34:41 PM	BCl3 MFC set to  0.000000
10/23/2010	3:34:41 PM	PHl3 MFC set to  0.000000
10/23/2010	3:34:41 PM	SiCl4 MFC set to  0.000000
10/23/2010	3:34:41 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	3:34:41 PM	Tube furnace set to 0
10/23/2010	3:35:41 PM	H2 valve closed
10/23/2010	3:35:41 PM	BCl3 valve closed
10/23/2010	3:35:41 PM	PH3 valve closed
10/23/2010	3:35:41 PM	SiCl4 pre valve closed
10/23/2010	3:35:41 PM	SiCl4 post valve closed
10/23/2010	3:35:41 PM	Bubbler valve closed
10/23/2010	3:35:41 PM	Helium valve opened
10/23/2010	3:35:41 PM	Main Vac valve opened
10/23/2010	3:35:41 PM	Bypass valve opened
10/23/2010	3:35:41 PM	Helium MFC set to  100.000000
10/23/2010	3:35:41 PM	H2 MFC set to  0.000000
10/23/2010	3:35:41 PM	BCl3 MFC set to  0.000000
10/23/2010	3:35:41 PM	PHl3 MFC set to  0.000000
10/23/2010	3:35:41 PM	SiCl4 MFC set to  0.000000
10/23/2010	3:35:41 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	3:35:41 PM	Tube furnace set to 0
10/23/2010	3:36:41 PM	Helium valve closed
10/23/2010	3:36:41 PM	H2 valve closed
10/23/2010	3:36:41 PM	BCl3 valve closed
10/23/2010	3:36:41 PM	PH3 valve closed
10/23/2010	3:36:41 PM	SiCl4 pre valve closed
10/23/2010	3:36:41 PM	SiCl4 post valve closed
10/23/2010	3:36:41 PM	Bubbler valve closed
10/23/2010	3:36:41 PM	Main Vac valve opened
10/23/2010	3:36:41 PM	Bypass valve opened
10/23/2010	3:36:41 PM	Helium MFC set to  0.000000
10/23/2010	3:36:41 PM	H2 MFC set to  0.000000
10/23/2010	3:36:41 PM	BCl3 MFC set to  0.000000
10/23/2010	3:36:41 PM	PHl3 MFC set to  0.000000
10/23/2010	3:36:41 PM	SiCl4 MFC set to  0.000000
10/23/2010	3:36:41 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	3:36:41 PM	Tube furnace set to 0
10/23/2010	3:37:41 PM	H2 valve closed
10/23/2010	3:37:41 PM	BCl3 valve closed
10/23/2010	3:37:42 PM	PH3 valve closed
10/23/2010	3:37:42 PM	SiCl4 pre valve closed
10/23/2010	3:37:42 PM	SiCl4 post valve closed
10/23/2010	3:37:42 PM	Bubbler valve closed
10/23/2010	3:37:42 PM	Helium valve opened
10/23/2010	3:37:42 PM	Main Vac valve opened
10/23/2010	3:37:42 PM	Bypass valve opened
10/23/2010	3:37:42 PM	Helium MFC set to  100.000000
10/23/2010	3:37:42 PM	H2 MFC set to  0.000000
10/23/2010	3:37:42 PM	BCl3 MFC set to  0.000000
10/23/2010	3:37:42 PM	PHl3 MFC set to  0.000000
10/23/2010	3:37:42 PM	SiCl4 MFC set to  0.000000
10/23/2010	3:37:42 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	3:37:42 PM	Tube furnace set to 0
10/23/2010	3:38:42 PM	Helium valve closed
10/23/2010	3:38:42 PM	H2 valve closed
10/23/2010	3:38:42 PM	BCl3 valve closed
10/23/2010	3:38:42 PM	PH3 valve closed
10/23/2010	3:38:42 PM	SiCl4 pre valve closed
10/23/2010	3:38:42 PM	SiCl4 post valve closed
10/23/2010	3:38:42 PM	Bubbler valve closed
10/23/2010	3:38:42 PM	Main Vac valve opened
10/23/2010	3:38:42 PM	Bypass valve opened
10/23/2010	3:38:42 PM	Helium MFC set to  0.000000
10/23/2010	3:38:42 PM	H2 MFC set to  0.000000
10/23/2010	3:38:42 PM	BCl3 MFC set to  0.000000
10/23/2010	3:38:42 PM	PHl3 MFC set to  0.000000
10/23/2010	3:38:42 PM	SiCl4 MFC set to  0.000000
10/23/2010	3:38:42 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	3:38:42 PM	Tube furnace set to 0
10/23/2010	3:39:42 PM	H2 valve closed
10/23/2010	3:39:42 PM	BCl3 valve closed
10/23/2010	3:39:42 PM	PH3 valve closed
10/23/2010	3:39:42 PM	SiCl4 pre valve closed
10/23/2010	3:39:42 PM	SiCl4 post valve closed
10/23/2010	3:39:42 PM	Bubbler valve closed
10/23/2010	3:39:42 PM	Helium valve opened
10/23/2010	3:39:42 PM	Main Vac valve opened
10/23/2010	3:39:42 PM	Bypass valve opened
10/23/2010	3:39:42 PM	Helium MFC set to  100.000000
10/23/2010	3:39:42 PM	H2 MFC set to  0.000000
10/23/2010	3:39:42 PM	BCl3 MFC set to  0.000000
10/23/2010	3:39:42 PM	PHl3 MFC set to  0.000000
10/23/2010	3:39:42 PM	SiCl4 MFC set to  0.000000
10/23/2010	3:39:42 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	3:39:42 PM	Tube furnace set to 0
10/23/2010	3:40:42 PM	Helium valve closed
10/23/2010	3:40:42 PM	H2 valve closed
10/23/2010	3:40:42 PM	BCl3 valve closed
10/23/2010	3:40:42 PM	PH3 valve closed
10/23/2010	3:40:42 PM	SiCl4 pre valve closed
10/23/2010	3:40:42 PM	SiCl4 post valve closed
10/23/2010	3:40:42 PM	Bubbler valve closed
10/23/2010	3:40:42 PM	Main Vac valve opened
10/23/2010	3:40:42 PM	Bypass valve opened
10/23/2010	3:40:42 PM	Helium MFC set to  0.000000
10/23/2010	3:40:42 PM	H2 MFC set to  0.000000
10/23/2010	3:40:42 PM	BCl3 MFC set to  0.000000
10/23/2010	3:40:42 PM	PHl3 MFC set to  0.000000
10/23/2010	3:40:42 PM	SiCl4 MFC set to  0.000000
10/23/2010	3:40:42 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	3:40:42 PM	Tube furnace set to 0
10/23/2010	3:41:42 PM	H2 valve closed
10/23/2010	3:41:42 PM	BCl3 valve closed
10/23/2010	3:41:42 PM	PH3 valve closed
10/23/2010	3:41:42 PM	SiCl4 pre valve closed
10/23/2010	3:41:42 PM	SiCl4 post valve closed
10/23/2010	3:41:42 PM	Bubbler valve closed
10/23/2010	3:41:42 PM	Helium valve opened
10/23/2010	3:41:42 PM	Main Vac valve opened
10/23/2010	3:41:42 PM	Bypass valve opened
10/23/2010	3:41:42 PM	Helium MFC set to  100.000000
10/23/2010	3:41:42 PM	H2 MFC set to  0.000000
10/23/2010	3:41:42 PM	BCl3 MFC set to  0.000000
10/23/2010	3:41:42 PM	PHl3 MFC set to  0.000000
10/23/2010	3:41:42 PM	SiCl4 MFC set to  0.000000
10/23/2010	3:41:42 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	3:41:42 PM	Tube furnace set to 0
10/23/2010	3:42:42 PM	Helium valve closed
10/23/2010	3:42:42 PM	H2 valve closed
10/23/2010	3:42:42 PM	BCl3 valve closed
10/23/2010	3:42:42 PM	PH3 valve closed
10/23/2010	3:42:42 PM	SiCl4 pre valve closed
10/23/2010	3:42:42 PM	SiCl4 post valve closed
10/23/2010	3:42:42 PM	Bubbler valve closed
10/23/2010	3:42:42 PM	Main Vac valve opened
10/23/2010	3:42:42 PM	Bypass valve opened
10/23/2010	3:42:42 PM	Helium MFC set to  0.000000
10/23/2010	3:42:42 PM	H2 MFC set to  0.000000
10/23/2010	3:42:43 PM	BCl3 MFC set to  0.000000
10/23/2010	3:42:43 PM	PHl3 MFC set to  0.000000
10/23/2010	3:42:43 PM	SiCl4 MFC set to  0.000000
10/23/2010	3:42:43 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	3:42:43 PM	Tube furnace set to 0
10/23/2010	3:43:43 PM	H2 valve closed
10/23/2010	3:43:43 PM	BCl3 valve closed
10/23/2010	3:43:43 PM	PH3 valve closed
10/23/2010	3:43:43 PM	SiCl4 pre valve closed
10/23/2010	3:43:43 PM	SiCl4 post valve closed
10/23/2010	3:43:43 PM	Bubbler valve closed
10/23/2010	3:43:43 PM	Helium valve opened
10/23/2010	3:43:43 PM	Main Vac valve opened
10/23/2010	3:43:43 PM	Bypass valve opened
10/23/2010	3:43:43 PM	Helium MFC set to  100.000000
10/23/2010	3:43:43 PM	H2 MFC set to  0.000000
10/23/2010	3:43:43 PM	BCl3 MFC set to  0.000000
10/23/2010	3:43:43 PM	PHl3 MFC set to  0.000000
10/23/2010	3:43:43 PM	SiCl4 MFC set to  0.000000
10/23/2010	3:43:43 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	3:43:43 PM	Tube furnace set to 0
10/23/2010	3:44:43 PM	Helium valve closed
10/23/2010	3:44:43 PM	H2 valve closed
10/23/2010	3:44:43 PM	BCl3 valve closed
10/23/2010	3:44:43 PM	PH3 valve closed
10/23/2010	3:44:43 PM	SiCl4 pre valve closed
10/23/2010	3:44:43 PM	SiCl4 post valve closed
10/23/2010	3:44:43 PM	Bubbler valve closed
10/23/2010	3:44:43 PM	Main Vac valve opened
10/23/2010	3:44:43 PM	Bypass valve opened
10/23/2010	3:44:43 PM	Helium MFC set to  0.000000
10/23/2010	3:44:43 PM	H2 MFC set to  0.000000
10/23/2010	3:44:43 PM	BCl3 MFC set to  0.000000
10/23/2010	3:44:43 PM	PHl3 MFC set to  0.000000
10/23/2010	3:44:43 PM	SiCl4 MFC set to  0.000000
10/23/2010	3:44:43 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	3:44:43 PM	Tube furnace set to 0
10/23/2010	3:45:43 PM	H2 valve closed
10/23/2010	3:45:43 PM	BCl3 valve closed
10/23/2010	3:45:43 PM	PH3 valve closed
10/23/2010	3:45:43 PM	SiCl4 pre valve closed
10/23/2010	3:45:43 PM	SiCl4 post valve closed
10/23/2010	3:45:43 PM	Bubbler valve closed
10/23/2010	3:45:43 PM	Helium valve opened
10/23/2010	3:45:43 PM	Main Vac valve opened
10/23/2010	3:45:43 PM	Bypass valve opened
10/23/2010	3:45:43 PM	Helium MFC set to  100.000000
10/23/2010	3:45:43 PM	H2 MFC set to  0.000000
10/23/2010	3:45:43 PM	BCl3 MFC set to  0.000000
10/23/2010	3:45:43 PM	PHl3 MFC set to  0.000000
10/23/2010	3:45:43 PM	SiCl4 MFC set to  0.000000
10/23/2010	3:45:43 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	3:45:43 PM	Tube furnace set to 0
10/23/2010	3:46:43 PM	Helium valve closed
10/23/2010	3:46:43 PM	H2 valve closed
10/23/2010	3:46:43 PM	BCl3 valve closed
10/23/2010	3:46:43 PM	PH3 valve closed
10/23/2010	3:46:43 PM	SiCl4 pre valve closed
10/23/2010	3:46:43 PM	SiCl4 post valve closed
10/23/2010	3:46:43 PM	Bubbler valve closed
10/23/2010	3:46:43 PM	Main Vac valve opened
10/23/2010	3:46:43 PM	Bypass valve opened
10/23/2010	3:46:43 PM	Helium MFC set to  0.000000
10/23/2010	3:46:43 PM	H2 MFC set to  0.000000
10/23/2010	3:46:43 PM	BCl3 MFC set to  0.000000
10/23/2010	3:46:43 PM	PHl3 MFC set to  0.000000
10/23/2010	3:46:43 PM	SiCl4 MFC set to  0.000000
10/23/2010	3:46:43 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	3:46:43 PM	Tube furnace set to 0
10/23/2010	3:47:43 PM	H2 valve closed
10/23/2010	3:47:43 PM	BCl3 valve closed
10/23/2010	3:47:43 PM	PH3 valve closed
10/23/2010	3:47:43 PM	SiCl4 pre valve closed
10/23/2010	3:47:43 PM	SiCl4 post valve closed
10/23/2010	3:47:43 PM	Bubbler valve closed
10/23/2010	3:47:43 PM	Helium valve opened
10/23/2010	3:47:43 PM	Main Vac valve opened
10/23/2010	3:47:43 PM	Bypass valve opened
10/23/2010	3:47:43 PM	Helium MFC set to  100.000000
10/23/2010	3:47:43 PM	H2 MFC set to  0.000000
10/23/2010	3:47:43 PM	BCl3 MFC set to  0.000000
10/23/2010	3:47:43 PM	PHl3 MFC set to  0.000000
10/23/2010	3:47:43 PM	SiCl4 MFC set to  0.000000
10/23/2010	3:47:43 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	3:47:44 PM	Tube furnace set to 0
10/23/2010	3:48:44 PM	Helium valve closed
10/23/2010	3:48:44 PM	H2 valve closed
10/23/2010	3:48:44 PM	BCl3 valve closed
10/23/2010	3:48:44 PM	PH3 valve closed
10/23/2010	3:48:44 PM	SiCl4 pre valve closed
10/23/2010	3:48:44 PM	SiCl4 post valve closed
10/23/2010	3:48:44 PM	Bubbler valve closed
10/23/2010	3:48:44 PM	Main Vac valve opened
10/23/2010	3:48:44 PM	Bypass valve opened
10/23/2010	3:48:44 PM	Helium MFC set to  0.000000
10/23/2010	3:48:44 PM	H2 MFC set to  0.000000
10/23/2010	3:48:44 PM	BCl3 MFC set to  0.000000
10/23/2010	3:48:44 PM	PHl3 MFC set to  0.000000
10/23/2010	3:48:44 PM	SiCl4 MFC set to  0.000000
10/23/2010	3:48:44 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	3:48:44 PM	Tube furnace set to 0
10/23/2010	3:49:44 PM	H2 valve closed
10/23/2010	3:49:44 PM	BCl3 valve closed
10/23/2010	3:49:44 PM	PH3 valve closed
10/23/2010	3:49:44 PM	SiCl4 pre valve closed
10/23/2010	3:49:44 PM	SiCl4 post valve closed
10/23/2010	3:49:44 PM	Bubbler valve closed
10/23/2010	3:49:44 PM	Helium valve opened
10/23/2010	3:49:44 PM	Main Vac valve opened
10/23/2010	3:49:44 PM	Bypass valve opened
10/23/2010	3:49:44 PM	Helium MFC set to  100.000000
10/23/2010	3:49:44 PM	H2 MFC set to  0.000000
10/23/2010	3:49:44 PM	BCl3 MFC set to  0.000000
10/23/2010	3:49:44 PM	PHl3 MFC set to  0.000000
10/23/2010	3:49:44 PM	SiCl4 MFC set to  0.000000
10/23/2010	3:49:44 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	3:49:44 PM	Tube furnace set to 0
10/23/2010	3:50:44 PM	Helium valve closed
10/23/2010	3:50:44 PM	H2 valve closed
10/23/2010	3:50:44 PM	BCl3 valve closed
10/23/2010	3:50:44 PM	PH3 valve closed
10/23/2010	3:50:44 PM	SiCl4 pre valve closed
10/23/2010	3:50:44 PM	SiCl4 post valve closed
10/23/2010	3:50:44 PM	Bubbler valve closed
10/23/2010	3:50:44 PM	Main Vac valve opened
10/23/2010	3:50:44 PM	Bypass valve opened
10/23/2010	3:50:44 PM	Helium MFC set to  0.000000
10/23/2010	3:50:44 PM	H2 MFC set to  0.000000
10/23/2010	3:50:44 PM	BCl3 MFC set to  0.000000
10/23/2010	3:50:44 PM	PHl3 MFC set to  0.000000
10/23/2010	3:50:44 PM	SiCl4 MFC set to  0.000000
10/23/2010	3:50:44 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	3:50:44 PM	Tube furnace set to 0
10/23/2010	3:51:44 PM	H2 valve closed
10/23/2010	3:51:44 PM	BCl3 valve closed
10/23/2010	3:51:44 PM	PH3 valve closed
10/23/2010	3:51:44 PM	SiCl4 pre valve closed
10/23/2010	3:51:44 PM	SiCl4 post valve closed
10/23/2010	3:51:44 PM	Bubbler valve closed
10/23/2010	3:51:44 PM	Helium valve opened
10/23/2010	3:51:44 PM	Main Vac valve opened
10/23/2010	3:51:44 PM	Bypass valve opened
10/23/2010	3:51:44 PM	Helium MFC set to  100.000000
10/23/2010	3:51:44 PM	H2 MFC set to  0.000000
10/23/2010	3:51:44 PM	BCl3 MFC set to  0.000000
10/23/2010	3:51:44 PM	PHl3 MFC set to  0.000000
10/23/2010	3:51:44 PM	SiCl4 MFC set to  0.000000
10/23/2010	3:51:44 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	3:51:44 PM	Tube furnace set to 0
10/23/2010	3:52:44 PM	Helium valve closed
10/23/2010	3:52:44 PM	H2 valve closed
10/23/2010	3:52:44 PM	BCl3 valve closed
10/23/2010	3:52:44 PM	PH3 valve closed
10/23/2010	3:52:44 PM	SiCl4 pre valve closed
10/23/2010	3:52:44 PM	SiCl4 post valve closed
10/23/2010	3:52:44 PM	Bubbler valve closed
10/23/2010	3:52:44 PM	Main Vac valve opened
10/23/2010	3:52:44 PM	Bypass valve opened
10/23/2010	3:52:44 PM	Helium MFC set to  0.000000
10/23/2010	3:52:44 PM	H2 MFC set to  0.000000
10/23/2010	3:52:44 PM	BCl3 MFC set to  0.000000
10/23/2010	3:52:44 PM	PHl3 MFC set to  0.000000
10/23/2010	3:52:44 PM	SiCl4 MFC set to  0.000000
10/23/2010	3:52:44 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	3:52:45 PM	Tube furnace set to 0
10/23/2010	3:52:46 PM	Run finished at 3:52 PM
10/23/2010	3:52:46 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/23/2010	3:54:59 PM	Helium valve opened
10/23/2010	3:55:02 PM	Helium MFC set to  100.000000
10/23/2010	3:55:13 PM	Helium MFC set to  100.000000
10/23/2010	4:12:40 PM	Helium valve closed
10/23/2010	4:12:42 PM	Helium MFC set to  0.000000
10/23/2010	4:12:44 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/23/2010	4:12:44 PM	Recipe started at 4:12 PM
10/23/2010	4:12:44 PM	Helium valve closed
10/23/2010	4:12:44 PM	H2 valve closed
10/23/2010	4:12:44 PM	BCl3 valve closed
10/23/2010	4:12:44 PM	PH3 valve closed
10/23/2010	4:12:44 PM	SiCl4 pre valve closed
10/23/2010	4:12:44 PM	SiCl4 post valve closed
10/23/2010	4:12:44 PM	Main Vac valve closed
10/23/2010	4:12:44 PM	Bubbler valve closed
10/23/2010	4:12:44 PM	Bypass valve opened
10/23/2010	4:12:44 PM	Helium MFC set to  0.000000
10/23/2010	4:12:44 PM	H2 MFC set to  0.000000
10/23/2010	4:12:44 PM	BCl3 MFC set to  0.000000
10/23/2010	4:12:44 PM	PHl3 MFC set to  0.000000
10/23/2010	4:12:44 PM	SiCl4 MFC set to  0.000000
10/23/2010	4:12:44 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	4:12:45 PM	Tube furnace set to 0
10/23/2010	4:12:45 PM	Helium valve closed
10/23/2010	4:12:45 PM	H2 valve closed
10/23/2010	4:12:45 PM	BCl3 valve closed
10/23/2010	4:12:45 PM	PH3 valve closed
10/23/2010	4:12:45 PM	SiCl4 pre valve closed
10/23/2010	4:12:45 PM	SiCl4 post valve closed
10/23/2010	4:12:45 PM	Bubbler valve closed
10/23/2010	4:12:45 PM	Main Vac valve opened
10/23/2010	4:12:45 PM	Bypass valve opened
10/23/2010	4:12:45 PM	Helium MFC set to  0.000000
10/23/2010	4:12:45 PM	H2 MFC set to  0.000000
10/23/2010	4:12:45 PM	BCl3 MFC set to  0.000000
10/23/2010	4:12:45 PM	PHl3 MFC set to  0.000000
10/23/2010	4:12:45 PM	SiCl4 MFC set to  0.000000
10/23/2010	4:12:45 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	4:12:45 PM	Tube furnace set to 0
10/23/2010	4:12:45 PM	Run finished at 4:12 PM
10/23/2010	4:12:45 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/23/2010	4:13:31 PM	Recipe started at 4:13 PM
10/23/2010	4:13:31 PM	Helium valve closed
10/23/2010	4:13:31 PM	BCl3 valve closed
10/23/2010	4:13:31 PM	PH3 valve closed
10/23/2010	4:13:31 PM	SiCl4 pre valve closed
10/23/2010	4:13:31 PM	SiCl4 post valve closed
10/23/2010	4:13:31 PM	Main Vac valve closed
10/23/2010	4:13:31 PM	Bypass valve closed
10/23/2010	4:13:31 PM	Bubbler valve closed
10/23/2010	4:13:31 PM	H2 valve opened
10/23/2010	4:13:31 PM	Helium MFC set to  0.000000
10/23/2010	4:13:31 PM	H2 MFC set to  500.000000
10/23/2010	4:13:31 PM	BCl3 MFC set to  0.000000
10/23/2010	4:13:31 PM	PHl3 MFC set to  0.000000
10/23/2010	4:13:31 PM	SiCl4 MFC set to  0.000000
10/23/2010	4:13:31 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	4:13:31 PM	Tube furnace set to 1000
10/23/2010	4:14:50 PM	Helium valve closed
10/23/2010	4:14:50 PM	BCl3 valve closed
10/23/2010	4:14:50 PM	PH3 valve closed
10/23/2010	4:14:50 PM	SiCl4 pre valve closed
10/23/2010	4:14:50 PM	SiCl4 post valve closed
10/23/2010	4:14:50 PM	Main Vac valve closed
10/23/2010	4:14:50 PM	Bypass valve closed
10/23/2010	4:14:50 PM	H2 valve opened
10/23/2010	4:14:50 PM	Bubbler valve opened
10/23/2010	4:14:50 PM	Helium MFC set to  0.000000
10/23/2010	4:14:50 PM	H2 MFC set to  500.000000
10/23/2010	4:14:50 PM	BCl3 MFC set to  0.000000
10/23/2010	4:14:50 PM	PHl3 MFC set to  0.000000
10/23/2010	4:14:50 PM	SiCl4 MFC set to  0.000000
10/23/2010	4:14:50 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	4:14:50 PM	Tube furnace set to 1000
10/23/2010	4:34:50 PM	Helium valve closed
10/23/2010	4:34:50 PM	PH3 valve closed
10/23/2010	4:34:50 PM	Main Vac valve closed
10/23/2010	4:34:50 PM	Bypass valve closed
10/23/2010	4:34:50 PM	H2 valve opened
10/23/2010	4:34:50 PM	BCl3 valve opened
10/23/2010	4:34:50 PM	SiCl4 pre valve opened
10/23/2010	4:34:50 PM	SiCl4 post valve opened
10/23/2010	4:34:50 PM	Bubbler valve opened
10/23/2010	4:34:50 PM	Helium MFC set to  0.000000
10/23/2010	4:34:50 PM	H2 MFC set to  500.000000
10/23/2010	4:34:50 PM	BCl3 MFC set to  12.000000
10/23/2010	4:34:50 PM	PHl3 MFC set to  0.000000
10/23/2010	4:34:50 PM	SiCl4 MFC set to  50.000000
10/23/2010	4:34:50 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	4:34:50 PM	Tube furnace set to 1000
10/23/2010	4:48:10 PM	Helium valve closed
10/23/2010	4:48:10 PM	BCl3 valve closed
10/23/2010	4:48:10 PM	PH3 valve closed
10/23/2010	4:48:10 PM	SiCl4 pre valve closed
10/23/2010	4:48:10 PM	SiCl4 post valve closed
10/23/2010	4:48:10 PM	Main Vac valve closed
10/23/2010	4:48:10 PM	Bypass valve closed
10/23/2010	4:48:10 PM	H2 valve opened
10/23/2010	4:48:10 PM	Bubbler valve opened
10/23/2010	4:48:10 PM	Helium MFC set to  0.000000
10/23/2010	4:48:10 PM	H2 MFC set to  500.000000
10/23/2010	4:48:10 PM	BCl3 MFC set to  0.000000
10/23/2010	4:48:10 PM	PHl3 MFC set to  0.000000
10/23/2010	4:48:10 PM	SiCl4 MFC set to  0.000000
10/23/2010	4:48:10 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	4:48:10 PM	Tube furnace set to 750
10/23/2010	5:08:10 PM	H2 valve closed
10/23/2010	5:08:10 PM	BCl3 valve closed
10/23/2010	5:08:10 PM	PH3 valve closed
10/23/2010	5:08:10 PM	SiCl4 pre valve closed
10/23/2010	5:08:10 PM	SiCl4 post valve closed
10/23/2010	5:08:10 PM	Main Vac valve closed
10/23/2010	5:08:10 PM	Bypass valve closed
10/23/2010	5:08:10 PM	Helium valve opened
10/23/2010	5:08:10 PM	Bubbler valve opened
10/23/2010	5:08:10 PM	Helium MFC set to  500.000000
10/23/2010	5:08:10 PM	H2 MFC set to  0.000000
10/23/2010	5:08:10 PM	BCl3 MFC set to  0.000000
10/23/2010	5:08:10 PM	PHl3 MFC set to  0.000000
10/23/2010	5:08:10 PM	SiCl4 MFC set to  0.000000
10/23/2010	5:08:10 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	5:08:10 PM	Tube furnace set to 0
10/23/2010	5:13:29 PM	Run aborted at 5:13 PM
10/23/2010	5:13:29 PM	Helium valve closed
10/23/2010	5:13:29 PM	H2 valve closed
10/23/2010	5:13:29 PM	BCl3 valve closed
10/23/2010	5:13:29 PM	PH3 valve closed
10/23/2010	5:13:29 PM	SiCl4 pre valve closed
10/23/2010	5:13:29 PM	SiCl4 post valve closed
10/23/2010	5:13:29 PM	Bypass valve closed
10/23/2010	5:13:29 PM	Main Vac valve closed
10/23/2010	5:13:29 PM	Bubbler valve closed
10/23/2010	5:13:29 PM	Helium MFC set to  0.000000
10/23/2010	5:13:29 PM	H2 MFC set to  0.000000
10/23/2010	5:13:29 PM	BCl3 MFC set to  0.000000
10/23/2010	5:13:29 PM	PHl3 MFC set to  0.000000
10/23/2010	5:13:29 PM	SiCl4 MFC set to  0.000000
10/23/2010	5:13:29 PM	Tube furnace set to 0
10/23/2010	5:13:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/23/2010	5:13:31 PM	Recipe started at 5:13 PM
10/23/2010	5:13:31 PM	H2 valve closed
10/23/2010	5:13:31 PM	BCl3 valve closed
10/23/2010	5:13:31 PM	PH3 valve closed
10/23/2010	5:13:31 PM	SiCl4 pre valve closed
10/23/2010	5:13:31 PM	SiCl4 post valve closed
10/23/2010	5:13:31 PM	Main Vac valve closed
10/23/2010	5:13:31 PM	Bypass valve closed
10/23/2010	5:13:31 PM	Bubbler valve closed
10/23/2010	5:13:31 PM	Helium valve opened
10/23/2010	5:13:31 PM	Helium MFC set to  500.000000
10/23/2010	5:13:31 PM	H2 MFC set to  0.000000
10/23/2010	5:13:31 PM	BCl3 MFC set to  0.000000
10/23/2010	5:13:31 PM	PHl3 MFC set to  0.000000
10/23/2010	5:13:31 PM	SiCl4 MFC set to  0.000000
10/23/2010	5:13:31 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	5:13:31 PM	Tube furnace set to 0
10/23/2010	5:13:32 PM	Helium valve closed
10/23/2010	5:13:32 PM	H2 valve closed
10/23/2010	5:13:32 PM	BCl3 valve closed
10/23/2010	5:13:32 PM	PH3 valve closed
10/23/2010	5:13:32 PM	SiCl4 pre valve closed
10/23/2010	5:13:32 PM	SiCl4 post valve closed
10/23/2010	5:13:32 PM	Main Vac valve closed
10/23/2010	5:13:32 PM	Bypass valve closed
10/23/2010	5:13:32 PM	Bubbler valve closed
10/23/2010	5:13:32 PM	Helium MFC set to  0.000000
10/23/2010	5:13:32 PM	H2 MFC set to  0.000000
10/23/2010	5:13:32 PM	BCl3 MFC set to  0.000000
10/23/2010	5:13:32 PM	PHl3 MFC set to  0.000000
10/23/2010	5:13:32 PM	SiCl4 MFC set to  0.000000
10/23/2010	5:13:32 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	5:13:32 PM	Tube furnace set to 0
10/23/2010	5:13:32 PM	Run finished at 5:13 PM
10/23/2010	5:13:32 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/23/2010	5:19:25 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/23/2010	5:19:25 PM	Recipe started at 5:19 PM
10/23/2010	5:19:25 PM	Helium valve closed
10/23/2010	5:19:25 PM	H2 valve closed
10/23/2010	5:19:25 PM	BCl3 valve closed
10/23/2010	5:19:25 PM	PH3 valve closed
10/23/2010	5:19:25 PM	SiCl4 pre valve closed
10/23/2010	5:19:25 PM	SiCl4 post valve closed
10/23/2010	5:19:25 PM	Main Vac valve closed
10/23/2010	5:19:25 PM	Bubbler valve closed
10/23/2010	5:19:25 PM	Bypass valve opened
10/23/2010	5:19:25 PM	Helium MFC set to  0.000000
10/23/2010	5:19:25 PM	H2 MFC set to  0.000000
10/23/2010	5:19:25 PM	BCl3 MFC set to  0.000000
10/23/2010	5:19:25 PM	PHl3 MFC set to  0.000000
10/23/2010	5:19:25 PM	SiCl4 MFC set to  0.000000
10/23/2010	5:19:25 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	5:19:26 PM	Tube furnace set to 0
10/23/2010	5:20:16 PM	Helium valve closed
10/23/2010	5:20:16 PM	H2 valve closed
10/23/2010	5:20:16 PM	BCl3 valve closed
10/23/2010	5:20:16 PM	PH3 valve closed
10/23/2010	5:20:16 PM	SiCl4 pre valve closed
10/23/2010	5:20:16 PM	SiCl4 post valve closed
10/23/2010	5:20:16 PM	Bubbler valve closed
10/23/2010	5:20:16 PM	Main Vac valve opened
10/23/2010	5:20:16 PM	Bypass valve opened
10/23/2010	5:20:16 PM	Helium MFC set to  0.000000
10/23/2010	5:20:16 PM	H2 MFC set to  0.000000
10/23/2010	5:20:16 PM	BCl3 MFC set to  0.000000
10/23/2010	5:20:16 PM	PHl3 MFC set to  0.000000
10/23/2010	5:20:16 PM	SiCl4 MFC set to  0.000000
10/23/2010	5:20:16 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	5:20:16 PM	Tube furnace set to 0
10/23/2010	5:20:17 PM	Run finished at 5:20 PM
10/23/2010	5:20:17 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/23/2010	5:20:34 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/23/2010	5:20:45 PM	Recipe started at 5:20 PM
10/23/2010	5:20:45 PM	Helium valve closed
10/23/2010	5:20:45 PM	H2 valve closed
10/23/2010	5:20:45 PM	BCl3 valve closed
10/23/2010	5:20:45 PM	PH3 valve closed
10/23/2010	5:20:45 PM	SiCl4 pre valve closed
10/23/2010	5:20:45 PM	SiCl4 post valve closed
10/23/2010	5:20:45 PM	Main Vac valve closed
10/23/2010	5:20:45 PM	Bubbler valve closed
10/23/2010	5:20:45 PM	Bypass valve opened
10/23/2010	5:20:45 PM	Helium MFC set to  0.000000
10/23/2010	5:20:45 PM	H2 MFC set to  0.000000
10/23/2010	5:20:45 PM	BCl3 MFC set to  0.000000
10/23/2010	5:20:45 PM	PHl3 MFC set to  0.000000
10/23/2010	5:20:45 PM	SiCl4 MFC set to  0.000000
10/23/2010	5:20:45 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	5:20:46 PM	Tube furnace set to 0
10/23/2010	5:20:46 PM	Helium valve closed
10/23/2010	5:20:46 PM	H2 valve closed
10/23/2010	5:20:46 PM	BCl3 valve closed
10/23/2010	5:20:46 PM	PH3 valve closed
10/23/2010	5:20:46 PM	SiCl4 pre valve closed
10/23/2010	5:20:46 PM	SiCl4 post valve closed
10/23/2010	5:20:46 PM	Bubbler valve closed
10/23/2010	5:20:46 PM	Main Vac valve opened
10/23/2010	5:20:46 PM	Bypass valve opened
10/23/2010	5:20:46 PM	Helium MFC set to  0.000000
10/23/2010	5:20:46 PM	H2 MFC set to  0.000000
10/23/2010	5:20:46 PM	BCl3 MFC set to  0.000000
10/23/2010	5:20:46 PM	PHl3 MFC set to  0.000000
10/23/2010	5:20:46 PM	SiCl4 MFC set to  0.000000
10/23/2010	5:20:46 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	5:20:46 PM	Tube furnace set to 0
10/23/2010	5:21:46 PM	H2 valve closed
10/23/2010	5:21:46 PM	BCl3 valve closed
10/23/2010	5:21:46 PM	PH3 valve closed
10/23/2010	5:21:46 PM	SiCl4 pre valve closed
10/23/2010	5:21:46 PM	SiCl4 post valve closed
10/23/2010	5:21:46 PM	Bubbler valve closed
10/23/2010	5:21:46 PM	Helium valve opened
10/23/2010	5:21:46 PM	Main Vac valve opened
10/23/2010	5:21:46 PM	Bypass valve opened
10/23/2010	5:21:46 PM	Helium MFC set to  100.000000
10/23/2010	5:21:46 PM	H2 MFC set to  0.000000
10/23/2010	5:21:46 PM	BCl3 MFC set to  0.000000
10/23/2010	5:21:46 PM	PHl3 MFC set to  0.000000
10/23/2010	5:21:46 PM	SiCl4 MFC set to  0.000000
10/23/2010	5:21:46 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	5:21:46 PM	Tube furnace set to 0
10/23/2010	5:22:46 PM	Helium valve closed
10/23/2010	5:22:46 PM	H2 valve closed
10/23/2010	5:22:46 PM	BCl3 valve closed
10/23/2010	5:22:46 PM	PH3 valve closed
10/23/2010	5:22:46 PM	SiCl4 pre valve closed
10/23/2010	5:22:46 PM	SiCl4 post valve closed
10/23/2010	5:22:46 PM	Bubbler valve closed
10/23/2010	5:22:46 PM	Main Vac valve opened
10/23/2010	5:22:46 PM	Bypass valve opened
10/23/2010	5:22:46 PM	Helium MFC set to  0.000000
10/23/2010	5:22:46 PM	H2 MFC set to  0.000000
10/23/2010	5:22:46 PM	BCl3 MFC set to  0.000000
10/23/2010	5:22:46 PM	PHl3 MFC set to  0.000000
10/23/2010	5:22:46 PM	SiCl4 MFC set to  0.000000
10/23/2010	5:22:46 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	5:22:46 PM	Tube furnace set to 0
10/23/2010	5:23:46 PM	H2 valve closed
10/23/2010	5:23:46 PM	BCl3 valve closed
10/23/2010	5:23:46 PM	PH3 valve closed
10/23/2010	5:23:46 PM	SiCl4 pre valve closed
10/23/2010	5:23:46 PM	SiCl4 post valve closed
10/23/2010	5:23:46 PM	Bubbler valve closed
10/23/2010	5:23:46 PM	Helium valve opened
10/23/2010	5:23:46 PM	Main Vac valve opened
10/23/2010	5:23:46 PM	Bypass valve opened
10/23/2010	5:23:46 PM	Helium MFC set to  100.000000
10/23/2010	5:23:46 PM	H2 MFC set to  0.000000
10/23/2010	5:23:46 PM	BCl3 MFC set to  0.000000
10/23/2010	5:23:46 PM	PHl3 MFC set to  0.000000
10/23/2010	5:23:46 PM	SiCl4 MFC set to  0.000000
10/23/2010	5:23:46 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	5:23:47 PM	Tube furnace set to 0
10/23/2010	5:24:47 PM	Helium valve closed
10/23/2010	5:24:47 PM	H2 valve closed
10/23/2010	5:24:47 PM	BCl3 valve closed
10/23/2010	5:24:47 PM	PH3 valve closed
10/23/2010	5:24:47 PM	SiCl4 pre valve closed
10/23/2010	5:24:47 PM	SiCl4 post valve closed
10/23/2010	5:24:47 PM	Bubbler valve closed
10/23/2010	5:24:47 PM	Main Vac valve opened
10/23/2010	5:24:47 PM	Bypass valve opened
10/23/2010	5:24:47 PM	Helium MFC set to  0.000000
10/23/2010	5:24:47 PM	H2 MFC set to  0.000000
10/23/2010	5:24:47 PM	BCl3 MFC set to  0.000000
10/23/2010	5:24:47 PM	PHl3 MFC set to  0.000000
10/23/2010	5:24:47 PM	SiCl4 MFC set to  0.000000
10/23/2010	5:24:47 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	5:24:47 PM	Tube furnace set to 0
10/23/2010	5:25:47 PM	H2 valve closed
10/23/2010	5:25:47 PM	BCl3 valve closed
10/23/2010	5:25:47 PM	PH3 valve closed
10/23/2010	5:25:47 PM	SiCl4 pre valve closed
10/23/2010	5:25:47 PM	SiCl4 post valve closed
10/23/2010	5:25:47 PM	Bubbler valve closed
10/23/2010	5:25:47 PM	Helium valve opened
10/23/2010	5:25:47 PM	Main Vac valve opened
10/23/2010	5:25:47 PM	Bypass valve opened
10/23/2010	5:25:47 PM	Helium MFC set to  100.000000
10/23/2010	5:25:47 PM	H2 MFC set to  0.000000
10/23/2010	5:25:47 PM	BCl3 MFC set to  0.000000
10/23/2010	5:25:47 PM	PHl3 MFC set to  0.000000
10/23/2010	5:25:47 PM	SiCl4 MFC set to  0.000000
10/23/2010	5:25:47 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	5:25:47 PM	Tube furnace set to 0
10/23/2010	5:26:47 PM	Helium valve closed
10/23/2010	5:26:47 PM	H2 valve closed
10/23/2010	5:26:47 PM	BCl3 valve closed
10/23/2010	5:26:47 PM	PH3 valve closed
10/23/2010	5:26:47 PM	SiCl4 pre valve closed
10/23/2010	5:26:47 PM	SiCl4 post valve closed
10/23/2010	5:26:47 PM	Bubbler valve closed
10/23/2010	5:26:47 PM	Main Vac valve opened
10/23/2010	5:26:47 PM	Bypass valve opened
10/23/2010	5:26:47 PM	Helium MFC set to  0.000000
10/23/2010	5:26:47 PM	H2 MFC set to  0.000000
10/23/2010	5:26:47 PM	BCl3 MFC set to  0.000000
10/23/2010	5:26:47 PM	PHl3 MFC set to  0.000000
10/23/2010	5:26:47 PM	SiCl4 MFC set to  0.000000
10/23/2010	5:26:47 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	5:26:47 PM	Tube furnace set to 0
10/23/2010	5:27:47 PM	H2 valve closed
10/23/2010	5:27:47 PM	BCl3 valve closed
10/23/2010	5:27:47 PM	PH3 valve closed
10/23/2010	5:27:47 PM	SiCl4 pre valve closed
10/23/2010	5:27:47 PM	SiCl4 post valve closed
10/23/2010	5:27:47 PM	Bubbler valve closed
10/23/2010	5:27:47 PM	Helium valve opened
10/23/2010	5:27:47 PM	Main Vac valve opened
10/23/2010	5:27:47 PM	Bypass valve opened
10/23/2010	5:27:47 PM	Helium MFC set to  100.000000
10/23/2010	5:27:47 PM	H2 MFC set to  0.000000
10/23/2010	5:27:47 PM	BCl3 MFC set to  0.000000
10/23/2010	5:27:47 PM	PHl3 MFC set to  0.000000
10/23/2010	5:27:47 PM	SiCl4 MFC set to  0.000000
10/23/2010	5:27:47 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	5:27:47 PM	Tube furnace set to 0
10/23/2010	5:28:47 PM	Helium valve closed
10/23/2010	5:28:47 PM	H2 valve closed
10/23/2010	5:28:47 PM	BCl3 valve closed
10/23/2010	5:28:47 PM	PH3 valve closed
10/23/2010	5:28:47 PM	SiCl4 pre valve closed
10/23/2010	5:28:47 PM	SiCl4 post valve closed
10/23/2010	5:28:47 PM	Bubbler valve closed
10/23/2010	5:28:47 PM	Main Vac valve opened
10/23/2010	5:28:47 PM	Bypass valve opened
10/23/2010	5:28:47 PM	Helium MFC set to  0.000000
10/23/2010	5:28:47 PM	H2 MFC set to  0.000000
10/23/2010	5:28:47 PM	BCl3 MFC set to  0.000000
10/23/2010	5:28:47 PM	PHl3 MFC set to  0.000000
10/23/2010	5:28:47 PM	SiCl4 MFC set to  0.000000
10/23/2010	5:28:47 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	5:28:48 PM	Tube furnace set to 0
10/23/2010	5:29:48 PM	H2 valve closed
10/23/2010	5:29:48 PM	BCl3 valve closed
10/23/2010	5:29:48 PM	PH3 valve closed
10/23/2010	5:29:48 PM	SiCl4 pre valve closed
10/23/2010	5:29:48 PM	SiCl4 post valve closed
10/23/2010	5:29:48 PM	Bubbler valve closed
10/23/2010	5:29:48 PM	Helium valve opened
10/23/2010	5:29:48 PM	Main Vac valve opened
10/23/2010	5:29:48 PM	Bypass valve opened
10/23/2010	5:29:48 PM	Helium MFC set to  100.000000
10/23/2010	5:29:48 PM	H2 MFC set to  0.000000
10/23/2010	5:29:48 PM	BCl3 MFC set to  0.000000
10/23/2010	5:29:48 PM	PHl3 MFC set to  0.000000
10/23/2010	5:29:48 PM	SiCl4 MFC set to  0.000000
10/23/2010	5:29:48 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	5:29:48 PM	Tube furnace set to 0
10/23/2010	5:30:48 PM	Helium valve closed
10/23/2010	5:30:48 PM	H2 valve closed
10/23/2010	5:30:48 PM	BCl3 valve closed
10/23/2010	5:30:48 PM	PH3 valve closed
10/23/2010	5:30:48 PM	SiCl4 pre valve closed
10/23/2010	5:30:48 PM	SiCl4 post valve closed
10/23/2010	5:30:48 PM	Bubbler valve closed
10/23/2010	5:30:48 PM	Main Vac valve opened
10/23/2010	5:30:48 PM	Bypass valve opened
10/23/2010	5:30:48 PM	Helium MFC set to  0.000000
10/23/2010	5:30:48 PM	H2 MFC set to  0.000000
10/23/2010	5:30:48 PM	BCl3 MFC set to  0.000000
10/23/2010	5:30:48 PM	PHl3 MFC set to  0.000000
10/23/2010	5:30:48 PM	SiCl4 MFC set to  0.000000
10/23/2010	5:30:48 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	5:30:48 PM	Tube furnace set to 0
10/23/2010	5:31:48 PM	H2 valve closed
10/23/2010	5:31:48 PM	BCl3 valve closed
10/23/2010	5:31:48 PM	PH3 valve closed
10/23/2010	5:31:48 PM	SiCl4 pre valve closed
10/23/2010	5:31:48 PM	SiCl4 post valve closed
10/23/2010	5:31:48 PM	Bubbler valve closed
10/23/2010	5:31:48 PM	Helium valve opened
10/23/2010	5:31:48 PM	Main Vac valve opened
10/23/2010	5:31:48 PM	Bypass valve opened
10/23/2010	5:31:48 PM	Helium MFC set to  100.000000
10/23/2010	5:31:48 PM	H2 MFC set to  0.000000
10/23/2010	5:31:48 PM	BCl3 MFC set to  0.000000
10/23/2010	5:31:48 PM	PHl3 MFC set to  0.000000
10/23/2010	5:31:48 PM	SiCl4 MFC set to  0.000000
10/23/2010	5:31:48 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	5:31:48 PM	Tube furnace set to 0
10/23/2010	5:32:48 PM	Helium valve closed
10/23/2010	5:32:48 PM	H2 valve closed
10/23/2010	5:32:48 PM	BCl3 valve closed
10/23/2010	5:32:48 PM	PH3 valve closed
10/23/2010	5:32:48 PM	SiCl4 pre valve closed
10/23/2010	5:32:48 PM	SiCl4 post valve closed
10/23/2010	5:32:48 PM	Bubbler valve closed
10/23/2010	5:32:48 PM	Main Vac valve opened
10/23/2010	5:32:48 PM	Bypass valve opened
10/23/2010	5:32:48 PM	Helium MFC set to  0.000000
10/23/2010	5:32:48 PM	H2 MFC set to  0.000000
10/23/2010	5:32:48 PM	BCl3 MFC set to  0.000000
10/23/2010	5:32:48 PM	PHl3 MFC set to  0.000000
10/23/2010	5:32:48 PM	SiCl4 MFC set to  0.000000
10/23/2010	5:32:48 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	5:32:48 PM	Tube furnace set to 0
10/23/2010	5:33:48 PM	H2 valve closed
10/23/2010	5:33:48 PM	BCl3 valve closed
10/23/2010	5:33:48 PM	PH3 valve closed
10/23/2010	5:33:48 PM	SiCl4 pre valve closed
10/23/2010	5:33:48 PM	SiCl4 post valve closed
10/23/2010	5:33:48 PM	Bubbler valve closed
10/23/2010	5:33:48 PM	Helium valve opened
10/23/2010	5:33:48 PM	Main Vac valve opened
10/23/2010	5:33:48 PM	Bypass valve opened
10/23/2010	5:33:48 PM	Helium MFC set to  100.000000
10/23/2010	5:33:48 PM	H2 MFC set to  0.000000
10/23/2010	5:33:48 PM	BCl3 MFC set to  0.000000
10/23/2010	5:33:48 PM	PHl3 MFC set to  0.000000
10/23/2010	5:33:48 PM	SiCl4 MFC set to  0.000000
10/23/2010	5:33:48 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	5:33:49 PM	Tube furnace set to 0
10/23/2010	5:34:49 PM	Helium valve closed
10/23/2010	5:34:49 PM	H2 valve closed
10/23/2010	5:34:49 PM	BCl3 valve closed
10/23/2010	5:34:49 PM	PH3 valve closed
10/23/2010	5:34:49 PM	SiCl4 pre valve closed
10/23/2010	5:34:49 PM	SiCl4 post valve closed
10/23/2010	5:34:49 PM	Bubbler valve closed
10/23/2010	5:34:49 PM	Main Vac valve opened
10/23/2010	5:34:49 PM	Bypass valve opened
10/23/2010	5:34:49 PM	Helium MFC set to  0.000000
10/23/2010	5:34:49 PM	H2 MFC set to  0.000000
10/23/2010	5:34:49 PM	BCl3 MFC set to  0.000000
10/23/2010	5:34:49 PM	PHl3 MFC set to  0.000000
10/23/2010	5:34:49 PM	SiCl4 MFC set to  0.000000
10/23/2010	5:34:49 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	5:34:49 PM	Tube furnace set to 0
10/23/2010	5:35:49 PM	H2 valve closed
10/23/2010	5:35:49 PM	BCl3 valve closed
10/23/2010	5:35:49 PM	PH3 valve closed
10/23/2010	5:35:49 PM	SiCl4 pre valve closed
10/23/2010	5:35:49 PM	SiCl4 post valve closed
10/23/2010	5:35:49 PM	Bubbler valve closed
10/23/2010	5:35:49 PM	Helium valve opened
10/23/2010	5:35:49 PM	Main Vac valve opened
10/23/2010	5:35:49 PM	Bypass valve opened
10/23/2010	5:35:49 PM	Helium MFC set to  100.000000
10/23/2010	5:35:49 PM	H2 MFC set to  0.000000
10/23/2010	5:35:49 PM	BCl3 MFC set to  0.000000
10/23/2010	5:35:49 PM	PHl3 MFC set to  0.000000
10/23/2010	5:35:49 PM	SiCl4 MFC set to  0.000000
10/23/2010	5:35:49 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	5:35:49 PM	Tube furnace set to 0
10/23/2010	5:36:49 PM	Helium valve closed
10/23/2010	5:36:49 PM	H2 valve closed
10/23/2010	5:36:49 PM	BCl3 valve closed
10/23/2010	5:36:49 PM	PH3 valve closed
10/23/2010	5:36:49 PM	SiCl4 pre valve closed
10/23/2010	5:36:49 PM	SiCl4 post valve closed
10/23/2010	5:36:49 PM	Bubbler valve closed
10/23/2010	5:36:49 PM	Main Vac valve opened
10/23/2010	5:36:49 PM	Bypass valve opened
10/23/2010	5:36:49 PM	Helium MFC set to  0.000000
10/23/2010	5:36:49 PM	H2 MFC set to  0.000000
10/23/2010	5:36:49 PM	BCl3 MFC set to  0.000000
10/23/2010	5:36:49 PM	PHl3 MFC set to  0.000000
10/23/2010	5:36:49 PM	SiCl4 MFC set to  0.000000
10/23/2010	5:36:49 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	5:36:49 PM	Tube furnace set to 0
10/23/2010	5:37:49 PM	H2 valve closed
10/23/2010	5:37:49 PM	BCl3 valve closed
10/23/2010	5:37:49 PM	PH3 valve closed
10/23/2010	5:37:49 PM	SiCl4 pre valve closed
10/23/2010	5:37:49 PM	SiCl4 post valve closed
10/23/2010	5:37:49 PM	Bubbler valve closed
10/23/2010	5:37:49 PM	Helium valve opened
10/23/2010	5:37:49 PM	Main Vac valve opened
10/23/2010	5:37:49 PM	Bypass valve opened
10/23/2010	5:37:49 PM	Helium MFC set to  100.000000
10/23/2010	5:37:49 PM	H2 MFC set to  0.000000
10/23/2010	5:37:49 PM	BCl3 MFC set to  0.000000
10/23/2010	5:37:49 PM	PHl3 MFC set to  0.000000
10/23/2010	5:37:49 PM	SiCl4 MFC set to  0.000000
10/23/2010	5:37:49 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	5:37:49 PM	Tube furnace set to 0
10/23/2010	5:38:49 PM	Helium valve closed
10/23/2010	5:38:49 PM	H2 valve closed
10/23/2010	5:38:49 PM	BCl3 valve closed
10/23/2010	5:38:49 PM	PH3 valve closed
10/23/2010	5:38:49 PM	SiCl4 pre valve closed
10/23/2010	5:38:49 PM	SiCl4 post valve closed
10/23/2010	5:38:49 PM	Bubbler valve closed
10/23/2010	5:38:49 PM	Main Vac valve opened
10/23/2010	5:38:49 PM	Bypass valve opened
10/23/2010	5:38:49 PM	Helium MFC set to  0.000000
10/23/2010	5:38:49 PM	H2 MFC set to  0.000000
10/23/2010	5:38:49 PM	BCl3 MFC set to  0.000000
10/23/2010	5:38:49 PM	PHl3 MFC set to  0.000000
10/23/2010	5:38:49 PM	SiCl4 MFC set to  0.000000
10/23/2010	5:38:49 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	5:38:50 PM	Tube furnace set to 0
10/23/2010	5:39:50 PM	H2 valve closed
10/23/2010	5:39:50 PM	BCl3 valve closed
10/23/2010	5:39:50 PM	PH3 valve closed
10/23/2010	5:39:50 PM	SiCl4 pre valve closed
10/23/2010	5:39:50 PM	SiCl4 post valve closed
10/23/2010	5:39:50 PM	Bubbler valve closed
10/23/2010	5:39:50 PM	Helium valve opened
10/23/2010	5:39:50 PM	Main Vac valve opened
10/23/2010	5:39:50 PM	Bypass valve opened
10/23/2010	5:39:50 PM	Helium MFC set to  100.000000
10/23/2010	5:39:50 PM	H2 MFC set to  0.000000
10/23/2010	5:39:50 PM	BCl3 MFC set to  0.000000
10/23/2010	5:39:50 PM	PHl3 MFC set to  0.000000
10/23/2010	5:39:50 PM	SiCl4 MFC set to  0.000000
10/23/2010	5:39:50 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	5:39:50 PM	Tube furnace set to 0
10/23/2010	5:40:50 PM	Helium valve closed
10/23/2010	5:40:50 PM	H2 valve closed
10/23/2010	5:40:50 PM	BCl3 valve closed
10/23/2010	5:40:50 PM	PH3 valve closed
10/23/2010	5:40:50 PM	SiCl4 pre valve closed
10/23/2010	5:40:50 PM	SiCl4 post valve closed
10/23/2010	5:40:50 PM	Bubbler valve closed
10/23/2010	5:40:50 PM	Main Vac valve opened
10/23/2010	5:40:50 PM	Bypass valve opened
10/23/2010	5:40:50 PM	Helium MFC set to  0.000000
10/23/2010	5:40:50 PM	H2 MFC set to  0.000000
10/23/2010	5:40:50 PM	BCl3 MFC set to  0.000000
10/23/2010	5:40:50 PM	PHl3 MFC set to  0.000000
10/23/2010	5:40:50 PM	SiCl4 MFC set to  0.000000
10/23/2010	5:40:50 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	5:40:50 PM	Tube furnace set to 0
10/23/2010	5:40:51 PM	Run finished at 5:40 PM
10/23/2010	5:40:51 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/23/2010	5:41:43 PM	Helium MFC set to  100.000000
10/23/2010	5:41:44 PM	Helium valve opened
10/23/2010	5:48:00 PM	Helium valve closed
10/23/2010	5:48:03 PM	Helium MFC set to  0.000000
10/23/2010	5:49:37 PM	Helium MFC set to  100.000000
10/23/2010	5:49:39 PM	Helium valve opened
10/23/2010	5:50:42 PM	Helium valve closed
10/23/2010	5:50:44 PM	Helium MFC set to  0.000000
10/23/2010	5:51:36 PM	Recipe started at 5:51 PM
10/23/2010	5:51:36 PM	Helium valve closed
10/23/2010	5:51:36 PM	BCl3 valve closed
10/23/2010	5:51:36 PM	PH3 valve closed
10/23/2010	5:51:36 PM	SiCl4 pre valve closed
10/23/2010	5:51:36 PM	SiCl4 post valve closed
10/23/2010	5:51:36 PM	Main Vac valve closed
10/23/2010	5:51:36 PM	Bypass valve closed
10/23/2010	5:51:36 PM	Bubbler valve closed
10/23/2010	5:51:36 PM	H2 valve opened
10/23/2010	5:51:36 PM	Helium MFC set to  0.000000
10/23/2010	5:51:36 PM	H2 MFC set to  500.000000
10/23/2010	5:51:36 PM	BCl3 MFC set to  0.000000
10/23/2010	5:51:36 PM	PHl3 MFC set to  0.000000
10/23/2010	5:51:36 PM	SiCl4 MFC set to  0.000000
10/23/2010	5:51:36 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	5:51:36 PM	Tube furnace set to 1000
10/23/2010	5:52:52 PM	Helium valve closed
10/23/2010	5:52:52 PM	BCl3 valve closed
10/23/2010	5:52:52 PM	PH3 valve closed
10/23/2010	5:52:52 PM	SiCl4 pre valve closed
10/23/2010	5:52:52 PM	SiCl4 post valve closed
10/23/2010	5:52:52 PM	Main Vac valve closed
10/23/2010	5:52:52 PM	Bypass valve closed
10/23/2010	5:52:52 PM	H2 valve opened
10/23/2010	5:52:52 PM	Bubbler valve opened
10/23/2010	5:52:52 PM	Helium MFC set to  0.000000
10/23/2010	5:52:52 PM	H2 MFC set to  500.000000
10/23/2010	5:52:52 PM	BCl3 MFC set to  0.000000
10/23/2010	5:52:52 PM	PHl3 MFC set to  0.000000
10/23/2010	5:52:52 PM	SiCl4 MFC set to  0.000000
10/23/2010	5:52:52 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	5:52:52 PM	Tube furnace set to 1000
10/23/2010	6:12:52 PM	Helium valve closed
10/23/2010	6:12:52 PM	PH3 valve closed
10/23/2010	6:12:52 PM	Main Vac valve closed
10/23/2010	6:12:52 PM	Bypass valve closed
10/23/2010	6:12:52 PM	H2 valve opened
10/23/2010	6:12:52 PM	BCl3 valve opened
10/23/2010	6:12:52 PM	SiCl4 pre valve opened
10/23/2010	6:12:52 PM	SiCl4 post valve opened
10/23/2010	6:12:52 PM	Bubbler valve opened
10/23/2010	6:12:52 PM	Helium MFC set to  0.000000
10/23/2010	6:12:52 PM	H2 MFC set to  500.000000
10/23/2010	6:12:52 PM	BCl3 MFC set to  12.000000
10/23/2010	6:12:52 PM	PHl3 MFC set to  0.000000
10/23/2010	6:12:52 PM	SiCl4 MFC set to  50.000000
10/23/2010	6:12:52 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	6:12:52 PM	Tube furnace set to 1000
10/23/2010	6:26:12 PM	Helium valve closed
10/23/2010	6:26:12 PM	BCl3 valve closed
10/23/2010	6:26:12 PM	PH3 valve closed
10/23/2010	6:26:12 PM	SiCl4 pre valve closed
10/23/2010	6:26:12 PM	SiCl4 post valve closed
10/23/2010	6:26:12 PM	Main Vac valve closed
10/23/2010	6:26:12 PM	Bypass valve closed
10/23/2010	6:26:12 PM	H2 valve opened
10/23/2010	6:26:12 PM	Bubbler valve opened
10/23/2010	6:26:12 PM	Helium MFC set to  0.000000
10/23/2010	6:26:12 PM	H2 MFC set to  500.000000
10/23/2010	6:26:12 PM	BCl3 MFC set to  0.000000
10/23/2010	6:26:12 PM	PHl3 MFC set to  0.000000
10/23/2010	6:26:12 PM	SiCl4 MFC set to  0.000000
10/23/2010	6:26:12 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	6:26:12 PM	Tube furnace set to 750
10/23/2010	6:46:12 PM	H2 valve closed
10/23/2010	6:46:12 PM	BCl3 valve closed
10/23/2010	6:46:12 PM	PH3 valve closed
10/23/2010	6:46:12 PM	SiCl4 pre valve closed
10/23/2010	6:46:12 PM	SiCl4 post valve closed
10/23/2010	6:46:12 PM	Main Vac valve closed
10/23/2010	6:46:12 PM	Bypass valve closed
10/23/2010	6:46:12 PM	Helium valve opened
10/23/2010	6:46:12 PM	Bubbler valve opened
10/23/2010	6:46:12 PM	Helium MFC set to  500.000000
10/23/2010	6:46:12 PM	H2 MFC set to  0.000000
10/23/2010	6:46:12 PM	BCl3 MFC set to  0.000000
10/23/2010	6:46:12 PM	PHl3 MFC set to  0.000000
10/23/2010	6:46:12 PM	SiCl4 MFC set to  0.000000
10/23/2010	6:46:12 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	6:46:12 PM	Tube furnace set to 0
10/23/2010	7:06:12 PM	Helium valve closed
10/23/2010	7:06:12 PM	H2 valve closed
10/23/2010	7:06:12 PM	BCl3 valve closed
10/23/2010	7:06:12 PM	PH3 valve closed
10/23/2010	7:06:12 PM	SiCl4 pre valve closed
10/23/2010	7:06:12 PM	SiCl4 post valve closed
10/23/2010	7:06:12 PM	Main Vac valve closed
10/23/2010	7:06:12 PM	Bypass valve closed
10/23/2010	7:06:12 PM	Bubbler valve closed
10/23/2010	7:06:12 PM	Helium MFC set to  0.000000
10/23/2010	7:06:12 PM	H2 MFC set to  0.000000
10/23/2010	7:06:12 PM	BCl3 MFC set to  0.000000
10/23/2010	7:06:12 PM	PHl3 MFC set to  0.000000
10/23/2010	7:06:12 PM	SiCl4 MFC set to  0.000000
10/23/2010	7:06:12 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	7:06:12 PM	Tube furnace set to 0
10/23/2010	7:06:13 PM	Run finished at 7:06 PM
10/23/2010	7:23:13 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/23/2010	7:23:14 PM	Recipe started at 7:23 PM
10/23/2010	7:23:14 PM	H2 valve closed
10/23/2010	7:23:14 PM	BCl3 valve closed
10/23/2010	7:23:14 PM	PH3 valve closed
10/23/2010	7:23:14 PM	SiCl4 pre valve closed
10/23/2010	7:23:14 PM	SiCl4 post valve closed
10/23/2010	7:23:14 PM	Main Vac valve closed
10/23/2010	7:23:14 PM	Bypass valve closed
10/23/2010	7:23:14 PM	Bubbler valve closed
10/23/2010	7:23:14 PM	Helium valve opened
10/23/2010	7:23:14 PM	Helium MFC set to  500.000000
10/23/2010	7:23:14 PM	H2 MFC set to  0.000000
10/23/2010	7:23:14 PM	BCl3 MFC set to  0.000000
10/23/2010	7:23:14 PM	PHl3 MFC set to  0.000000
10/23/2010	7:23:14 PM	SiCl4 MFC set to  0.000000
10/23/2010	7:23:14 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	7:23:14 PM	Tube furnace set to 0
10/23/2010	7:23:16 PM	Helium valve closed
10/23/2010	7:23:16 PM	H2 valve closed
10/23/2010	7:23:16 PM	BCl3 valve closed
10/23/2010	7:23:16 PM	PH3 valve closed
10/23/2010	7:23:16 PM	SiCl4 pre valve closed
10/23/2010	7:23:16 PM	SiCl4 post valve closed
10/23/2010	7:23:16 PM	Main Vac valve closed
10/23/2010	7:23:16 PM	Bypass valve closed
10/23/2010	7:23:16 PM	Bubbler valve closed
10/23/2010	7:23:16 PM	Helium MFC set to  0.000000
10/23/2010	7:23:16 PM	H2 MFC set to  0.000000
10/23/2010	7:23:16 PM	BCl3 MFC set to  0.000000
10/23/2010	7:23:16 PM	PHl3 MFC set to  0.000000
10/23/2010	7:23:16 PM	SiCl4 MFC set to  0.000000
10/23/2010	7:23:16 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	7:23:16 PM	Tube furnace set to 0
10/23/2010	7:23:16 PM	Run finished at 7:23 PM
10/23/2010	7:23:16 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/23/2010	7:27:57 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/23/2010	7:27:58 PM	Recipe started at 7:27 PM
10/23/2010	7:27:58 PM	Helium valve closed
10/23/2010	7:27:58 PM	H2 valve closed
10/23/2010	7:27:58 PM	BCl3 valve closed
10/23/2010	7:27:58 PM	PH3 valve closed
10/23/2010	7:27:58 PM	SiCl4 pre valve closed
10/23/2010	7:27:58 PM	SiCl4 post valve closed
10/23/2010	7:27:58 PM	Main Vac valve closed
10/23/2010	7:27:58 PM	Bubbler valve closed
10/23/2010	7:27:58 PM	Bypass valve opened
10/23/2010	7:27:58 PM	Helium MFC set to  0.000000
10/23/2010	7:27:58 PM	H2 MFC set to  0.000000
10/23/2010	7:27:58 PM	BCl3 MFC set to  0.000000
10/23/2010	7:27:58 PM	PHl3 MFC set to  0.000000
10/23/2010	7:27:58 PM	SiCl4 MFC set to  0.000000
10/23/2010	7:27:58 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	7:27:58 PM	Tube furnace set to 0
10/23/2010	7:28:47 PM	Helium valve closed
10/23/2010	7:28:47 PM	H2 valve closed
10/23/2010	7:28:47 PM	BCl3 valve closed
10/23/2010	7:28:47 PM	PH3 valve closed
10/23/2010	7:28:47 PM	SiCl4 pre valve closed
10/23/2010	7:28:47 PM	SiCl4 post valve closed
10/23/2010	7:28:47 PM	Bubbler valve closed
10/23/2010	7:28:47 PM	Main Vac valve opened
10/23/2010	7:28:47 PM	Bypass valve opened
10/23/2010	7:28:47 PM	Helium MFC set to  0.000000
10/23/2010	7:28:47 PM	H2 MFC set to  0.000000
10/23/2010	7:28:47 PM	BCl3 MFC set to  0.000000
10/23/2010	7:28:47 PM	PHl3 MFC set to  0.000000
10/23/2010	7:28:47 PM	SiCl4 MFC set to  0.000000
10/23/2010	7:28:47 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	7:28:48 PM	Tube furnace set to 0
10/23/2010	7:28:48 PM	Run finished at 7:28 PM
10/23/2010	7:28:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/23/2010	7:29:07 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/23/2010	7:29:18 PM	Recipe started at 7:29 PM
10/23/2010	7:29:18 PM	Helium valve closed
10/23/2010	7:29:18 PM	H2 valve closed
10/23/2010	7:29:18 PM	BCl3 valve closed
10/23/2010	7:29:18 PM	PH3 valve closed
10/23/2010	7:29:18 PM	SiCl4 pre valve closed
10/23/2010	7:29:18 PM	SiCl4 post valve closed
10/23/2010	7:29:18 PM	Main Vac valve closed
10/23/2010	7:29:18 PM	Bubbler valve closed
10/23/2010	7:29:18 PM	Bypass valve opened
10/23/2010	7:29:18 PM	Helium MFC set to  0.000000
10/23/2010	7:29:18 PM	H2 MFC set to  0.000000
10/23/2010	7:29:18 PM	BCl3 MFC set to  0.000000
10/23/2010	7:29:18 PM	PHl3 MFC set to  0.000000
10/23/2010	7:29:18 PM	SiCl4 MFC set to  0.000000
10/23/2010	7:29:18 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	7:29:18 PM	Tube furnace set to 0
10/23/2010	7:29:19 PM	Helium valve closed
10/23/2010	7:29:19 PM	H2 valve closed
10/23/2010	7:29:19 PM	BCl3 valve closed
10/23/2010	7:29:19 PM	PH3 valve closed
10/23/2010	7:29:19 PM	SiCl4 pre valve closed
10/23/2010	7:29:19 PM	SiCl4 post valve closed
10/23/2010	7:29:19 PM	Bubbler valve closed
10/23/2010	7:29:19 PM	Main Vac valve opened
10/23/2010	7:29:19 PM	Bypass valve opened
10/23/2010	7:29:19 PM	Helium MFC set to  0.000000
10/23/2010	7:29:19 PM	H2 MFC set to  0.000000
10/23/2010	7:29:19 PM	BCl3 MFC set to  0.000000
10/23/2010	7:29:19 PM	PHl3 MFC set to  0.000000
10/23/2010	7:29:19 PM	SiCl4 MFC set to  0.000000
10/23/2010	7:29:19 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	7:29:19 PM	Tube furnace set to 0
10/23/2010	7:30:19 PM	H2 valve closed
10/23/2010	7:30:19 PM	BCl3 valve closed
10/23/2010	7:30:19 PM	PH3 valve closed
10/23/2010	7:30:19 PM	SiCl4 pre valve closed
10/23/2010	7:30:19 PM	SiCl4 post valve closed
10/23/2010	7:30:19 PM	Bubbler valve closed
10/23/2010	7:30:19 PM	Helium valve opened
10/23/2010	7:30:19 PM	Main Vac valve opened
10/23/2010	7:30:19 PM	Bypass valve opened
10/23/2010	7:30:19 PM	Helium MFC set to  100.000000
10/23/2010	7:30:19 PM	H2 MFC set to  0.000000
10/23/2010	7:30:19 PM	BCl3 MFC set to  0.000000
10/23/2010	7:30:19 PM	PHl3 MFC set to  0.000000
10/23/2010	7:30:19 PM	SiCl4 MFC set to  0.000000
10/23/2010	7:30:19 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	7:30:19 PM	Tube furnace set to 0
10/23/2010	7:31:19 PM	Helium valve closed
10/23/2010	7:31:19 PM	H2 valve closed
10/23/2010	7:31:19 PM	BCl3 valve closed
10/23/2010	7:31:19 PM	PH3 valve closed
10/23/2010	7:31:19 PM	SiCl4 pre valve closed
10/23/2010	7:31:19 PM	SiCl4 post valve closed
10/23/2010	7:31:19 PM	Bubbler valve closed
10/23/2010	7:31:19 PM	Main Vac valve opened
10/23/2010	7:31:19 PM	Bypass valve opened
10/23/2010	7:31:19 PM	Helium MFC set to  0.000000
10/23/2010	7:31:19 PM	H2 MFC set to  0.000000
10/23/2010	7:31:19 PM	BCl3 MFC set to  0.000000
10/23/2010	7:31:19 PM	PHl3 MFC set to  0.000000
10/23/2010	7:31:19 PM	SiCl4 MFC set to  0.000000
10/23/2010	7:31:19 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	7:31:19 PM	Tube furnace set to 0
10/23/2010	7:32:19 PM	H2 valve closed
10/23/2010	7:32:19 PM	BCl3 valve closed
10/23/2010	7:32:19 PM	PH3 valve closed
10/23/2010	7:32:19 PM	SiCl4 pre valve closed
10/23/2010	7:32:19 PM	SiCl4 post valve closed
10/23/2010	7:32:19 PM	Bubbler valve closed
10/23/2010	7:32:19 PM	Helium valve opened
10/23/2010	7:32:19 PM	Main Vac valve opened
10/23/2010	7:32:19 PM	Bypass valve opened
10/23/2010	7:32:19 PM	Helium MFC set to  100.000000
10/23/2010	7:32:19 PM	H2 MFC set to  0.000000
10/23/2010	7:32:19 PM	BCl3 MFC set to  0.000000
10/23/2010	7:32:19 PM	PHl3 MFC set to  0.000000
10/23/2010	7:32:19 PM	SiCl4 MFC set to  0.000000
10/23/2010	7:32:19 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	7:32:19 PM	Tube furnace set to 0
10/23/2010	7:33:20 PM	Helium valve closed
10/23/2010	7:33:20 PM	H2 valve closed
10/23/2010	7:33:20 PM	BCl3 valve closed
10/23/2010	7:33:20 PM	PH3 valve closed
10/23/2010	7:33:20 PM	SiCl4 pre valve closed
10/23/2010	7:33:20 PM	SiCl4 post valve closed
10/23/2010	7:33:20 PM	Bubbler valve closed
10/23/2010	7:33:20 PM	Main Vac valve opened
10/23/2010	7:33:20 PM	Bypass valve opened
10/23/2010	7:33:20 PM	Helium MFC set to  0.000000
10/23/2010	7:33:20 PM	H2 MFC set to  0.000000
10/23/2010	7:33:20 PM	BCl3 MFC set to  0.000000
10/23/2010	7:33:20 PM	PHl3 MFC set to  0.000000
10/23/2010	7:33:20 PM	SiCl4 MFC set to  0.000000
10/23/2010	7:33:20 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	7:33:20 PM	Tube furnace set to 0
10/23/2010	7:34:20 PM	H2 valve closed
10/23/2010	7:34:20 PM	BCl3 valve closed
10/23/2010	7:34:20 PM	PH3 valve closed
10/23/2010	7:34:20 PM	SiCl4 pre valve closed
10/23/2010	7:34:20 PM	SiCl4 post valve closed
10/23/2010	7:34:20 PM	Bubbler valve closed
10/23/2010	7:34:20 PM	Helium valve opened
10/23/2010	7:34:20 PM	Main Vac valve opened
10/23/2010	7:34:20 PM	Bypass valve opened
10/23/2010	7:34:20 PM	Helium MFC set to  100.000000
10/23/2010	7:34:20 PM	H2 MFC set to  0.000000
10/23/2010	7:34:20 PM	BCl3 MFC set to  0.000000
10/23/2010	7:34:20 PM	PHl3 MFC set to  0.000000
10/23/2010	7:34:20 PM	SiCl4 MFC set to  0.000000
10/23/2010	7:34:20 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	7:34:20 PM	Tube furnace set to 0
10/23/2010	7:35:20 PM	Helium valve closed
10/23/2010	7:35:20 PM	H2 valve closed
10/23/2010	7:35:20 PM	BCl3 valve closed
10/23/2010	7:35:20 PM	PH3 valve closed
10/23/2010	7:35:20 PM	SiCl4 pre valve closed
10/23/2010	7:35:20 PM	SiCl4 post valve closed
10/23/2010	7:35:20 PM	Bubbler valve closed
10/23/2010	7:35:20 PM	Main Vac valve opened
10/23/2010	7:35:20 PM	Bypass valve opened
10/23/2010	7:35:20 PM	Helium MFC set to  0.000000
10/23/2010	7:35:20 PM	H2 MFC set to  0.000000
10/23/2010	7:35:20 PM	BCl3 MFC set to  0.000000
10/23/2010	7:35:20 PM	PHl3 MFC set to  0.000000
10/23/2010	7:35:20 PM	SiCl4 MFC set to  0.000000
10/23/2010	7:35:20 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	7:35:20 PM	Tube furnace set to 0
10/23/2010	7:36:20 PM	H2 valve closed
10/23/2010	7:36:20 PM	BCl3 valve closed
10/23/2010	7:36:20 PM	PH3 valve closed
10/23/2010	7:36:20 PM	SiCl4 pre valve closed
10/23/2010	7:36:20 PM	SiCl4 post valve closed
10/23/2010	7:36:20 PM	Bubbler valve closed
10/23/2010	7:36:20 PM	Helium valve opened
10/23/2010	7:36:20 PM	Main Vac valve opened
10/23/2010	7:36:20 PM	Bypass valve opened
10/23/2010	7:36:20 PM	Helium MFC set to  100.000000
10/23/2010	7:36:20 PM	H2 MFC set to  0.000000
10/23/2010	7:36:20 PM	BCl3 MFC set to  0.000000
10/23/2010	7:36:20 PM	PHl3 MFC set to  0.000000
10/23/2010	7:36:20 PM	SiCl4 MFC set to  0.000000
10/23/2010	7:36:20 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	7:36:20 PM	Tube furnace set to 0
10/23/2010	7:37:20 PM	Helium valve closed
10/23/2010	7:37:20 PM	H2 valve closed
10/23/2010	7:37:20 PM	BCl3 valve closed
10/23/2010	7:37:20 PM	PH3 valve closed
10/23/2010	7:37:20 PM	SiCl4 pre valve closed
10/23/2010	7:37:20 PM	SiCl4 post valve closed
10/23/2010	7:37:20 PM	Bubbler valve closed
10/23/2010	7:37:20 PM	Main Vac valve opened
10/23/2010	7:37:20 PM	Bypass valve opened
10/23/2010	7:37:20 PM	Helium MFC set to  0.000000
10/23/2010	7:37:20 PM	H2 MFC set to  0.000000
10/23/2010	7:37:20 PM	BCl3 MFC set to  0.000000
10/23/2010	7:37:20 PM	PHl3 MFC set to  0.000000
10/23/2010	7:37:20 PM	SiCl4 MFC set to  0.000000
10/23/2010	7:37:20 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	7:37:20 PM	Tube furnace set to 0
10/23/2010	7:38:20 PM	H2 valve closed
10/23/2010	7:38:20 PM	BCl3 valve closed
10/23/2010	7:38:20 PM	PH3 valve closed
10/23/2010	7:38:20 PM	SiCl4 pre valve closed
10/23/2010	7:38:20 PM	SiCl4 post valve closed
10/23/2010	7:38:20 PM	Bubbler valve closed
10/23/2010	7:38:21 PM	Helium valve opened
10/23/2010	7:38:21 PM	Main Vac valve opened
10/23/2010	7:38:21 PM	Bypass valve opened
10/23/2010	7:38:21 PM	Helium MFC set to  100.000000
10/23/2010	7:38:21 PM	H2 MFC set to  0.000000
10/23/2010	7:38:21 PM	BCl3 MFC set to  0.000000
10/23/2010	7:38:21 PM	PHl3 MFC set to  0.000000
10/23/2010	7:38:21 PM	SiCl4 MFC set to  0.000000
10/23/2010	7:38:21 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	7:38:21 PM	Tube furnace set to 0
10/23/2010	7:39:21 PM	Helium valve closed
10/23/2010	7:39:21 PM	H2 valve closed
10/23/2010	7:39:21 PM	BCl3 valve closed
10/23/2010	7:39:21 PM	PH3 valve closed
10/23/2010	7:39:21 PM	SiCl4 pre valve closed
10/23/2010	7:39:21 PM	SiCl4 post valve closed
10/23/2010	7:39:21 PM	Bubbler valve closed
10/23/2010	7:39:21 PM	Main Vac valve opened
10/23/2010	7:39:21 PM	Bypass valve opened
10/23/2010	7:39:21 PM	Helium MFC set to  0.000000
10/23/2010	7:39:21 PM	H2 MFC set to  0.000000
10/23/2010	7:39:21 PM	BCl3 MFC set to  0.000000
10/23/2010	7:39:21 PM	PHl3 MFC set to  0.000000
10/23/2010	7:39:21 PM	SiCl4 MFC set to  0.000000
10/23/2010	7:39:21 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	7:39:21 PM	Tube furnace set to 0
10/23/2010	7:40:21 PM	H2 valve closed
10/23/2010	7:40:21 PM	BCl3 valve closed
10/23/2010	7:40:21 PM	PH3 valve closed
10/23/2010	7:40:21 PM	SiCl4 pre valve closed
10/23/2010	7:40:21 PM	SiCl4 post valve closed
10/23/2010	7:40:21 PM	Bubbler valve closed
10/23/2010	7:40:21 PM	Helium valve opened
10/23/2010	7:40:21 PM	Main Vac valve opened
10/23/2010	7:40:21 PM	Bypass valve opened
10/23/2010	7:40:21 PM	Helium MFC set to  100.000000
10/23/2010	7:40:21 PM	H2 MFC set to  0.000000
10/23/2010	7:40:21 PM	BCl3 MFC set to  0.000000
10/23/2010	7:40:21 PM	PHl3 MFC set to  0.000000
10/23/2010	7:40:21 PM	SiCl4 MFC set to  0.000000
10/23/2010	7:40:21 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	7:40:21 PM	Tube furnace set to 0
10/23/2010	7:41:21 PM	Helium valve closed
10/23/2010	7:41:21 PM	H2 valve closed
10/23/2010	7:41:21 PM	BCl3 valve closed
10/23/2010	7:41:21 PM	PH3 valve closed
10/23/2010	7:41:21 PM	SiCl4 pre valve closed
10/23/2010	7:41:21 PM	SiCl4 post valve closed
10/23/2010	7:41:21 PM	Bubbler valve closed
10/23/2010	7:41:21 PM	Main Vac valve opened
10/23/2010	7:41:21 PM	Bypass valve opened
10/23/2010	7:41:21 PM	Helium MFC set to  0.000000
10/23/2010	7:41:21 PM	H2 MFC set to  0.000000
10/23/2010	7:41:21 PM	BCl3 MFC set to  0.000000
10/23/2010	7:41:21 PM	PHl3 MFC set to  0.000000
10/23/2010	7:41:21 PM	SiCl4 MFC set to  0.000000
10/23/2010	7:41:21 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	7:41:21 PM	Tube furnace set to 0
10/23/2010	7:42:21 PM	H2 valve closed
10/23/2010	7:42:21 PM	BCl3 valve closed
10/23/2010	7:42:21 PM	PH3 valve closed
10/23/2010	7:42:21 PM	SiCl4 pre valve closed
10/23/2010	7:42:21 PM	SiCl4 post valve closed
10/23/2010	7:42:21 PM	Bubbler valve closed
10/23/2010	7:42:21 PM	Helium valve opened
10/23/2010	7:42:21 PM	Main Vac valve opened
10/23/2010	7:42:21 PM	Bypass valve opened
10/23/2010	7:42:21 PM	Helium MFC set to  100.000000
10/23/2010	7:42:21 PM	H2 MFC set to  0.000000
10/23/2010	7:42:21 PM	BCl3 MFC set to  0.000000
10/23/2010	7:42:21 PM	PHl3 MFC set to  0.000000
10/23/2010	7:42:21 PM	SiCl4 MFC set to  0.000000
10/23/2010	7:42:21 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	7:42:21 PM	Tube furnace set to 0
10/23/2010	7:43:21 PM	Helium valve closed
10/23/2010	7:43:21 PM	H2 valve closed
10/23/2010	7:43:21 PM	BCl3 valve closed
10/23/2010	7:43:21 PM	PH3 valve closed
10/23/2010	7:43:21 PM	SiCl4 pre valve closed
10/23/2010	7:43:21 PM	SiCl4 post valve closed
10/23/2010	7:43:21 PM	Bubbler valve closed
10/23/2010	7:43:21 PM	Main Vac valve opened
10/23/2010	7:43:21 PM	Bypass valve opened
10/23/2010	7:43:21 PM	Helium MFC set to  0.000000
10/23/2010	7:43:21 PM	H2 MFC set to  0.000000
10/23/2010	7:43:21 PM	BCl3 MFC set to  0.000000
10/23/2010	7:43:21 PM	PHl3 MFC set to  0.000000
10/23/2010	7:43:21 PM	SiCl4 MFC set to  0.000000
10/23/2010	7:43:22 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	7:43:22 PM	Tube furnace set to 0
10/23/2010	7:44:22 PM	H2 valve closed
10/23/2010	7:44:22 PM	BCl3 valve closed
10/23/2010	7:44:22 PM	PH3 valve closed
10/23/2010	7:44:22 PM	SiCl4 pre valve closed
10/23/2010	7:44:22 PM	SiCl4 post valve closed
10/23/2010	7:44:22 PM	Bubbler valve closed
10/23/2010	7:44:22 PM	Helium valve opened
10/23/2010	7:44:22 PM	Main Vac valve opened
10/23/2010	7:44:22 PM	Bypass valve opened
10/23/2010	7:44:22 PM	Helium MFC set to  100.000000
10/23/2010	7:44:22 PM	H2 MFC set to  0.000000
10/23/2010	7:44:22 PM	BCl3 MFC set to  0.000000
10/23/2010	7:44:22 PM	PHl3 MFC set to  0.000000
10/23/2010	7:44:22 PM	SiCl4 MFC set to  0.000000
10/23/2010	7:44:22 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	7:44:22 PM	Tube furnace set to 0
10/23/2010	7:44:45 PM	Run aborted at 7:44 PM
10/23/2010	7:44:45 PM	Helium valve closed
10/23/2010	7:44:45 PM	H2 valve closed
10/23/2010	7:44:45 PM	BCl3 valve closed
10/23/2010	7:44:45 PM	PH3 valve closed
10/23/2010	7:44:45 PM	SiCl4 pre valve closed
10/23/2010	7:44:45 PM	SiCl4 post valve closed
10/23/2010	7:44:45 PM	Bypass valve closed
10/23/2010	7:44:45 PM	Main Vac valve closed
10/23/2010	7:44:45 PM	Bubbler valve closed
10/23/2010	7:44:45 PM	Helium MFC set to  0.000000
10/23/2010	7:44:45 PM	H2 MFC set to  0.000000
10/23/2010	7:44:45 PM	BCl3 MFC set to  0.000000
10/23/2010	7:44:45 PM	PHl3 MFC set to  0.000000
10/23/2010	7:44:45 PM	SiCl4 MFC set to  0.000000
10/23/2010	7:44:45 PM	Tube furnace set to 0
10/23/2010	7:44:45 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/23/2010	7:44:47 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/23/2010	7:44:47 PM	Recipe started at 7:44 PM
10/23/2010	7:44:47 PM	Helium valve closed
10/23/2010	7:44:47 PM	H2 valve closed
10/23/2010	7:44:47 PM	BCl3 valve closed
10/23/2010	7:44:47 PM	PH3 valve closed
10/23/2010	7:44:47 PM	SiCl4 pre valve closed
10/23/2010	7:44:47 PM	SiCl4 post valve closed
10/23/2010	7:44:47 PM	Main Vac valve closed
10/23/2010	7:44:47 PM	Bubbler valve closed
10/23/2010	7:44:47 PM	Bypass valve opened
10/23/2010	7:44:47 PM	Helium MFC set to  0.000000
10/23/2010	7:44:47 PM	H2 MFC set to  0.000000
10/23/2010	7:44:47 PM	BCl3 MFC set to  0.000000
10/23/2010	7:44:47 PM	PHl3 MFC set to  0.000000
10/23/2010	7:44:47 PM	SiCl4 MFC set to  0.000000
10/23/2010	7:44:47 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	7:44:47 PM	Tube furnace set to 0
10/23/2010	7:44:48 PM	Helium valve closed
10/23/2010	7:44:48 PM	H2 valve closed
10/23/2010	7:44:48 PM	BCl3 valve closed
10/23/2010	7:44:48 PM	PH3 valve closed
10/23/2010	7:44:48 PM	SiCl4 pre valve closed
10/23/2010	7:44:48 PM	SiCl4 post valve closed
10/23/2010	7:44:48 PM	Bubbler valve closed
10/23/2010	7:44:48 PM	Main Vac valve opened
10/23/2010	7:44:48 PM	Bypass valve opened
10/23/2010	7:44:48 PM	Helium MFC set to  0.000000
10/23/2010	7:44:48 PM	H2 MFC set to  0.000000
10/23/2010	7:44:48 PM	BCl3 MFC set to  0.000000
10/23/2010	7:44:48 PM	PHl3 MFC set to  0.000000
10/23/2010	7:44:48 PM	SiCl4 MFC set to  0.000000
10/23/2010	7:44:48 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	7:44:48 PM	Tube furnace set to 0
10/23/2010	7:44:48 PM	Run finished at 7:44 PM
10/23/2010	7:44:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/23/2010	7:48:07 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/23/2010	7:48:19 PM	Recipe started at 7:48 PM
10/23/2010	7:48:19 PM	Helium valve closed
10/23/2010	7:48:19 PM	H2 valve closed
10/23/2010	7:48:19 PM	BCl3 valve closed
10/23/2010	7:48:19 PM	PH3 valve closed
10/23/2010	7:48:19 PM	SiCl4 pre valve closed
10/23/2010	7:48:19 PM	SiCl4 post valve closed
10/23/2010	7:48:19 PM	Main Vac valve closed
10/23/2010	7:48:19 PM	Bubbler valve closed
10/23/2010	7:48:19 PM	Bypass valve opened
10/23/2010	7:48:19 PM	Helium MFC set to  0.000000
10/23/2010	7:48:19 PM	H2 MFC set to  0.000000
10/23/2010	7:48:19 PM	BCl3 MFC set to  0.000000
10/23/2010	7:48:19 PM	PHl3 MFC set to  0.000000
10/23/2010	7:48:19 PM	SiCl4 MFC set to  0.000000
10/23/2010	7:48:19 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	7:48:20 PM	Tube furnace set to 0
10/23/2010	7:48:20 PM	Helium valve closed
10/23/2010	7:48:20 PM	H2 valve closed
10/23/2010	7:48:20 PM	BCl3 valve closed
10/23/2010	7:48:20 PM	PH3 valve closed
10/23/2010	7:48:20 PM	SiCl4 pre valve closed
10/23/2010	7:48:20 PM	SiCl4 post valve closed
10/23/2010	7:48:20 PM	Bubbler valve closed
10/23/2010	7:48:20 PM	Main Vac valve opened
10/23/2010	7:48:20 PM	Bypass valve opened
10/23/2010	7:48:20 PM	Helium MFC set to  0.000000
10/23/2010	7:48:20 PM	H2 MFC set to  0.000000
10/23/2010	7:48:20 PM	BCl3 MFC set to  0.000000
10/23/2010	7:48:20 PM	PHl3 MFC set to  0.000000
10/23/2010	7:48:20 PM	SiCl4 MFC set to  0.000000
10/23/2010	7:48:20 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	7:48:20 PM	Tube furnace set to 0
10/23/2010	7:49:20 PM	H2 valve closed
10/23/2010	7:49:20 PM	BCl3 valve closed
10/23/2010	7:49:20 PM	PH3 valve closed
10/23/2010	7:49:20 PM	SiCl4 pre valve closed
10/23/2010	7:49:20 PM	SiCl4 post valve closed
10/23/2010	7:49:20 PM	Bubbler valve closed
10/23/2010	7:49:20 PM	Helium valve opened
10/23/2010	7:49:20 PM	Main Vac valve opened
10/23/2010	7:49:20 PM	Bypass valve opened
10/23/2010	7:49:20 PM	Helium MFC set to  100.000000
10/23/2010	7:49:20 PM	H2 MFC set to  0.000000
10/23/2010	7:49:20 PM	BCl3 MFC set to  0.000000
10/23/2010	7:49:20 PM	PHl3 MFC set to  0.000000
10/23/2010	7:49:20 PM	SiCl4 MFC set to  0.000000
10/23/2010	7:49:20 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	7:49:20 PM	Tube furnace set to 0
10/23/2010	7:50:20 PM	Helium valve closed
10/23/2010	7:50:20 PM	H2 valve closed
10/23/2010	7:50:20 PM	BCl3 valve closed
10/23/2010	7:50:20 PM	PH3 valve closed
10/23/2010	7:50:20 PM	SiCl4 pre valve closed
10/23/2010	7:50:20 PM	SiCl4 post valve closed
10/23/2010	7:50:20 PM	Bubbler valve closed
10/23/2010	7:50:20 PM	Main Vac valve opened
10/23/2010	7:50:20 PM	Bypass valve opened
10/23/2010	7:50:20 PM	Helium MFC set to  0.000000
10/23/2010	7:50:20 PM	H2 MFC set to  0.000000
10/23/2010	7:50:20 PM	BCl3 MFC set to  0.000000
10/23/2010	7:50:20 PM	PHl3 MFC set to  0.000000
10/23/2010	7:50:20 PM	SiCl4 MFC set to  0.000000
10/23/2010	7:50:20 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	7:50:20 PM	Tube furnace set to 0
10/23/2010	7:51:20 PM	H2 valve closed
10/23/2010	7:51:20 PM	BCl3 valve closed
10/23/2010	7:51:20 PM	PH3 valve closed
10/23/2010	7:51:20 PM	SiCl4 pre valve closed
10/23/2010	7:51:20 PM	SiCl4 post valve closed
10/23/2010	7:51:20 PM	Bubbler valve closed
10/23/2010	7:51:20 PM	Helium valve opened
10/23/2010	7:51:20 PM	Main Vac valve opened
10/23/2010	7:51:20 PM	Bypass valve opened
10/23/2010	7:51:20 PM	Helium MFC set to  100.000000
10/23/2010	7:51:20 PM	H2 MFC set to  0.000000
10/23/2010	7:51:20 PM	BCl3 MFC set to  0.000000
10/23/2010	7:51:20 PM	PHl3 MFC set to  0.000000
10/23/2010	7:51:20 PM	SiCl4 MFC set to  0.000000
10/23/2010	7:51:20 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	7:51:21 PM	Tube furnace set to 0
10/23/2010	7:52:21 PM	Helium valve closed
10/23/2010	7:52:21 PM	H2 valve closed
10/23/2010	7:52:21 PM	BCl3 valve closed
10/23/2010	7:52:21 PM	PH3 valve closed
10/23/2010	7:52:21 PM	SiCl4 pre valve closed
10/23/2010	7:52:21 PM	SiCl4 post valve closed
10/23/2010	7:52:21 PM	Bubbler valve closed
10/23/2010	7:52:21 PM	Main Vac valve opened
10/23/2010	7:52:21 PM	Bypass valve opened
10/23/2010	7:52:21 PM	Helium MFC set to  0.000000
10/23/2010	7:52:21 PM	H2 MFC set to  0.000000
10/23/2010	7:52:21 PM	BCl3 MFC set to  0.000000
10/23/2010	7:52:21 PM	PHl3 MFC set to  0.000000
10/23/2010	7:52:21 PM	SiCl4 MFC set to  0.000000
10/23/2010	7:52:21 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	7:52:21 PM	Tube furnace set to 0
10/23/2010	7:53:21 PM	H2 valve closed
10/23/2010	7:53:21 PM	BCl3 valve closed
10/23/2010	7:53:21 PM	PH3 valve closed
10/23/2010	7:53:21 PM	SiCl4 pre valve closed
10/23/2010	7:53:21 PM	SiCl4 post valve closed
10/23/2010	7:53:21 PM	Bubbler valve closed
10/23/2010	7:53:21 PM	Helium valve opened
10/23/2010	7:53:21 PM	Main Vac valve opened
10/23/2010	7:53:21 PM	Bypass valve opened
10/23/2010	7:53:21 PM	Helium MFC set to  100.000000
10/23/2010	7:53:21 PM	H2 MFC set to  0.000000
10/23/2010	7:53:21 PM	BCl3 MFC set to  0.000000
10/23/2010	7:53:21 PM	PHl3 MFC set to  0.000000
10/23/2010	7:53:21 PM	SiCl4 MFC set to  0.000000
10/23/2010	7:53:21 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	7:53:21 PM	Tube furnace set to 0
10/23/2010	7:54:21 PM	Helium valve closed
10/23/2010	7:54:21 PM	H2 valve closed
10/23/2010	7:54:21 PM	BCl3 valve closed
10/23/2010	7:54:21 PM	PH3 valve closed
10/23/2010	7:54:21 PM	SiCl4 pre valve closed
10/23/2010	7:54:21 PM	SiCl4 post valve closed
10/23/2010	7:54:21 PM	Bubbler valve closed
10/23/2010	7:54:21 PM	Main Vac valve opened
10/23/2010	7:54:21 PM	Bypass valve opened
10/23/2010	7:54:21 PM	Helium MFC set to  0.000000
10/23/2010	7:54:21 PM	H2 MFC set to  0.000000
10/23/2010	7:54:21 PM	BCl3 MFC set to  0.000000
10/23/2010	7:54:21 PM	PHl3 MFC set to  0.000000
10/23/2010	7:54:21 PM	SiCl4 MFC set to  0.000000
10/23/2010	7:54:21 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	7:54:21 PM	Tube furnace set to 0
10/23/2010	7:55:21 PM	H2 valve closed
10/23/2010	7:55:21 PM	BCl3 valve closed
10/23/2010	7:55:21 PM	PH3 valve closed
10/23/2010	7:55:21 PM	SiCl4 pre valve closed
10/23/2010	7:55:21 PM	SiCl4 post valve closed
10/23/2010	7:55:21 PM	Bubbler valve closed
10/23/2010	7:55:21 PM	Helium valve opened
10/23/2010	7:55:21 PM	Main Vac valve opened
10/23/2010	7:55:21 PM	Bypass valve opened
10/23/2010	7:55:21 PM	Helium MFC set to  100.000000
10/23/2010	7:55:21 PM	H2 MFC set to  0.000000
10/23/2010	7:55:21 PM	BCl3 MFC set to  0.000000
10/23/2010	7:55:21 PM	PHl3 MFC set to  0.000000
10/23/2010	7:55:21 PM	SiCl4 MFC set to  0.000000
10/23/2010	7:55:21 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	7:55:21 PM	Tube furnace set to 0
10/23/2010	7:56:21 PM	Helium valve closed
10/23/2010	7:56:21 PM	H2 valve closed
10/23/2010	7:56:21 PM	BCl3 valve closed
10/23/2010	7:56:21 PM	PH3 valve closed
10/23/2010	7:56:21 PM	SiCl4 pre valve closed
10/23/2010	7:56:21 PM	SiCl4 post valve closed
10/23/2010	7:56:21 PM	Bubbler valve closed
10/23/2010	7:56:21 PM	Main Vac valve opened
10/23/2010	7:56:21 PM	Bypass valve opened
10/23/2010	7:56:21 PM	Helium MFC set to  0.000000
10/23/2010	7:56:21 PM	H2 MFC set to  0.000000
10/23/2010	7:56:21 PM	BCl3 MFC set to  0.000000
10/23/2010	7:56:21 PM	PHl3 MFC set to  0.000000
10/23/2010	7:56:21 PM	SiCl4 MFC set to  0.000000
10/23/2010	7:56:21 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	7:56:22 PM	Tube furnace set to 0
10/23/2010	7:57:22 PM	H2 valve closed
10/23/2010	7:57:22 PM	BCl3 valve closed
10/23/2010	7:57:22 PM	PH3 valve closed
10/23/2010	7:57:22 PM	SiCl4 pre valve closed
10/23/2010	7:57:22 PM	SiCl4 post valve closed
10/23/2010	7:57:22 PM	Bubbler valve closed
10/23/2010	7:57:22 PM	Helium valve opened
10/23/2010	7:57:22 PM	Main Vac valve opened
10/23/2010	7:57:22 PM	Bypass valve opened
10/23/2010	7:57:22 PM	Helium MFC set to  100.000000
10/23/2010	7:57:22 PM	H2 MFC set to  0.000000
10/23/2010	7:57:22 PM	BCl3 MFC set to  0.000000
10/23/2010	7:57:22 PM	PHl3 MFC set to  0.000000
10/23/2010	7:57:22 PM	SiCl4 MFC set to  0.000000
10/23/2010	7:57:22 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	7:57:22 PM	Tube furnace set to 0
10/23/2010	7:58:22 PM	Helium valve closed
10/23/2010	7:58:22 PM	H2 valve closed
10/23/2010	7:58:22 PM	BCl3 valve closed
10/23/2010	7:58:22 PM	PH3 valve closed
10/23/2010	7:58:22 PM	SiCl4 pre valve closed
10/23/2010	7:58:22 PM	SiCl4 post valve closed
10/23/2010	7:58:22 PM	Bubbler valve closed
10/23/2010	7:58:22 PM	Main Vac valve opened
10/23/2010	7:58:22 PM	Bypass valve opened
10/23/2010	7:58:22 PM	Helium MFC set to  0.000000
10/23/2010	7:58:22 PM	H2 MFC set to  0.000000
10/23/2010	7:58:22 PM	BCl3 MFC set to  0.000000
10/23/2010	7:58:22 PM	PHl3 MFC set to  0.000000
10/23/2010	7:58:22 PM	SiCl4 MFC set to  0.000000
10/23/2010	7:58:22 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	7:58:22 PM	Tube furnace set to 0
10/23/2010	7:59:22 PM	H2 valve closed
10/23/2010	7:59:22 PM	BCl3 valve closed
10/23/2010	7:59:22 PM	PH3 valve closed
10/23/2010	7:59:22 PM	SiCl4 pre valve closed
10/23/2010	7:59:22 PM	SiCl4 post valve closed
10/23/2010	7:59:22 PM	Bubbler valve closed
10/23/2010	7:59:22 PM	Helium valve opened
10/23/2010	7:59:22 PM	Main Vac valve opened
10/23/2010	7:59:22 PM	Bypass valve opened
10/23/2010	7:59:22 PM	Helium MFC set to  100.000000
10/23/2010	7:59:22 PM	H2 MFC set to  0.000000
10/23/2010	7:59:22 PM	BCl3 MFC set to  0.000000
10/23/2010	7:59:22 PM	PHl3 MFC set to  0.000000
10/23/2010	7:59:22 PM	SiCl4 MFC set to  0.000000
10/23/2010	7:59:22 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	7:59:22 PM	Tube furnace set to 0
10/23/2010	8:00:22 PM	Helium valve closed
10/23/2010	8:00:22 PM	H2 valve closed
10/23/2010	8:00:22 PM	BCl3 valve closed
10/23/2010	8:00:22 PM	PH3 valve closed
10/23/2010	8:00:22 PM	SiCl4 pre valve closed
10/23/2010	8:00:22 PM	SiCl4 post valve closed
10/23/2010	8:00:22 PM	Bubbler valve closed
10/23/2010	8:00:22 PM	Main Vac valve opened
10/23/2010	8:00:22 PM	Bypass valve opened
10/23/2010	8:00:22 PM	Helium MFC set to  0.000000
10/23/2010	8:00:22 PM	H2 MFC set to  0.000000
10/23/2010	8:00:22 PM	BCl3 MFC set to  0.000000
10/23/2010	8:00:22 PM	PHl3 MFC set to  0.000000
10/23/2010	8:00:22 PM	SiCl4 MFC set to  0.000000
10/23/2010	8:00:22 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	8:00:22 PM	Tube furnace set to 0
10/23/2010	8:01:22 PM	H2 valve closed
10/23/2010	8:01:22 PM	BCl3 valve closed
10/23/2010	8:01:22 PM	PH3 valve closed
10/23/2010	8:01:22 PM	SiCl4 pre valve closed
10/23/2010	8:01:22 PM	SiCl4 post valve closed
10/23/2010	8:01:22 PM	Bubbler valve closed
10/23/2010	8:01:22 PM	Helium valve opened
10/23/2010	8:01:22 PM	Main Vac valve opened
10/23/2010	8:01:22 PM	Bypass valve opened
10/23/2010	8:01:22 PM	Helium MFC set to  100.000000
10/23/2010	8:01:22 PM	H2 MFC set to  0.000000
10/23/2010	8:01:22 PM	BCl3 MFC set to  0.000000
10/23/2010	8:01:22 PM	PHl3 MFC set to  0.000000
10/23/2010	8:01:22 PM	SiCl4 MFC set to  0.000000
10/23/2010	8:01:22 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	8:01:23 PM	Tube furnace set to 0
10/23/2010	8:02:23 PM	Helium valve closed
10/23/2010	8:02:23 PM	H2 valve closed
10/23/2010	8:02:23 PM	BCl3 valve closed
10/23/2010	8:02:23 PM	PH3 valve closed
10/23/2010	8:02:23 PM	SiCl4 pre valve closed
10/23/2010	8:02:23 PM	SiCl4 post valve closed
10/23/2010	8:02:23 PM	Bubbler valve closed
10/23/2010	8:02:23 PM	Main Vac valve opened
10/23/2010	8:02:23 PM	Bypass valve opened
10/23/2010	8:02:23 PM	Helium MFC set to  0.000000
10/23/2010	8:02:23 PM	H2 MFC set to  0.000000
10/23/2010	8:02:23 PM	BCl3 MFC set to  0.000000
10/23/2010	8:02:23 PM	PHl3 MFC set to  0.000000
10/23/2010	8:02:23 PM	SiCl4 MFC set to  0.000000
10/23/2010	8:02:23 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	8:02:23 PM	Tube furnace set to 0
10/23/2010	8:03:23 PM	H2 valve closed
10/23/2010	8:03:23 PM	BCl3 valve closed
10/23/2010	8:03:23 PM	PH3 valve closed
10/23/2010	8:03:23 PM	SiCl4 pre valve closed
10/23/2010	8:03:23 PM	SiCl4 post valve closed
10/23/2010	8:03:23 PM	Bubbler valve closed
10/23/2010	8:03:23 PM	Helium valve opened
10/23/2010	8:03:23 PM	Main Vac valve opened
10/23/2010	8:03:23 PM	Bypass valve opened
10/23/2010	8:03:23 PM	Helium MFC set to  100.000000
10/23/2010	8:03:23 PM	H2 MFC set to  0.000000
10/23/2010	8:03:23 PM	BCl3 MFC set to  0.000000
10/23/2010	8:03:23 PM	PHl3 MFC set to  0.000000
10/23/2010	8:03:23 PM	SiCl4 MFC set to  0.000000
10/23/2010	8:03:23 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	8:03:23 PM	Tube furnace set to 0
10/23/2010	8:04:23 PM	Helium valve closed
10/23/2010	8:04:23 PM	H2 valve closed
10/23/2010	8:04:23 PM	BCl3 valve closed
10/23/2010	8:04:23 PM	PH3 valve closed
10/23/2010	8:04:23 PM	SiCl4 pre valve closed
10/23/2010	8:04:23 PM	SiCl4 post valve closed
10/23/2010	8:04:23 PM	Bubbler valve closed
10/23/2010	8:04:23 PM	Main Vac valve opened
10/23/2010	8:04:23 PM	Bypass valve opened
10/23/2010	8:04:23 PM	Helium MFC set to  0.000000
10/23/2010	8:04:23 PM	H2 MFC set to  0.000000
10/23/2010	8:04:23 PM	BCl3 MFC set to  0.000000
10/23/2010	8:04:23 PM	PHl3 MFC set to  0.000000
10/23/2010	8:04:23 PM	SiCl4 MFC set to  0.000000
10/23/2010	8:04:23 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	8:04:23 PM	Tube furnace set to 0
10/23/2010	8:05:23 PM	H2 valve closed
10/23/2010	8:05:23 PM	BCl3 valve closed
10/23/2010	8:05:23 PM	PH3 valve closed
10/23/2010	8:05:23 PM	SiCl4 pre valve closed
10/23/2010	8:05:23 PM	SiCl4 post valve closed
10/23/2010	8:05:23 PM	Bubbler valve closed
10/23/2010	8:05:23 PM	Helium valve opened
10/23/2010	8:05:23 PM	Main Vac valve opened
10/23/2010	8:05:23 PM	Bypass valve opened
10/23/2010	8:05:23 PM	Helium MFC set to  100.000000
10/23/2010	8:05:23 PM	H2 MFC set to  0.000000
10/23/2010	8:05:23 PM	BCl3 MFC set to  0.000000
10/23/2010	8:05:23 PM	PHl3 MFC set to  0.000000
10/23/2010	8:05:23 PM	SiCl4 MFC set to  0.000000
10/23/2010	8:05:23 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	8:05:23 PM	Tube furnace set to 0
10/23/2010	8:05:43 PM	Run aborted at 8:05 PM
10/23/2010	8:05:43 PM	Helium valve closed
10/23/2010	8:05:43 PM	H2 valve closed
10/23/2010	8:05:43 PM	BCl3 valve closed
10/23/2010	8:05:43 PM	PH3 valve closed
10/23/2010	8:05:43 PM	SiCl4 pre valve closed
10/23/2010	8:05:43 PM	SiCl4 post valve closed
10/23/2010	8:05:43 PM	Bypass valve closed
10/23/2010	8:05:43 PM	Main Vac valve closed
10/23/2010	8:05:43 PM	Bubbler valve closed
10/23/2010	8:05:43 PM	Helium MFC set to  0.000000
10/23/2010	8:05:43 PM	H2 MFC set to  0.000000
10/23/2010	8:05:43 PM	BCl3 MFC set to  0.000000
10/23/2010	8:05:43 PM	PHl3 MFC set to  0.000000
10/23/2010	8:05:43 PM	SiCl4 MFC set to  0.000000
10/23/2010	8:05:44 PM	Tube furnace set to 0
10/23/2010	8:05:44 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/23/2010	8:05:45 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/23/2010	8:05:46 PM	Recipe started at 8:05 PM
10/23/2010	8:05:46 PM	Helium valve closed
10/23/2010	8:05:46 PM	H2 valve closed
10/23/2010	8:05:46 PM	BCl3 valve closed
10/23/2010	8:05:46 PM	PH3 valve closed
10/23/2010	8:05:46 PM	SiCl4 pre valve closed
10/23/2010	8:05:46 PM	SiCl4 post valve closed
10/23/2010	8:05:46 PM	Main Vac valve closed
10/23/2010	8:05:46 PM	Bubbler valve closed
10/23/2010	8:05:46 PM	Bypass valve opened
10/23/2010	8:05:46 PM	Helium MFC set to  0.000000
10/23/2010	8:05:46 PM	H2 MFC set to  0.000000
10/23/2010	8:05:46 PM	BCl3 MFC set to  0.000000
10/23/2010	8:05:46 PM	PHl3 MFC set to  0.000000
10/23/2010	8:05:46 PM	SiCl4 MFC set to  0.000000
10/23/2010	8:05:46 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	8:05:46 PM	Tube furnace set to 0
10/23/2010	8:05:46 PM	Helium valve closed
10/23/2010	8:05:46 PM	H2 valve closed
10/23/2010	8:05:46 PM	BCl3 valve closed
10/23/2010	8:05:46 PM	PH3 valve closed
10/23/2010	8:05:46 PM	SiCl4 pre valve closed
10/23/2010	8:05:46 PM	SiCl4 post valve closed
10/23/2010	8:05:46 PM	Bubbler valve closed
10/23/2010	8:05:46 PM	Main Vac valve opened
10/23/2010	8:05:46 PM	Bypass valve opened
10/23/2010	8:05:46 PM	Helium MFC set to  0.000000
10/23/2010	8:05:46 PM	H2 MFC set to  0.000000
10/23/2010	8:05:46 PM	BCl3 MFC set to  0.000000
10/23/2010	8:05:46 PM	PHl3 MFC set to  0.000000
10/23/2010	8:05:46 PM	SiCl4 MFC set to  0.000000
10/23/2010	8:05:46 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	8:05:46 PM	Tube furnace set to 0
10/23/2010	8:05:46 PM	Run finished at 8:05 PM
10/23/2010	8:05:46 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/23/2010	8:06:40 PM	Helium MFC set to  100.000000
10/23/2010	8:06:42 PM	Helium valve opened
10/23/2010	8:11:08 PM	Helium valve closed
10/23/2010	8:11:11 PM	Helium MFC set to  0.000000
10/23/2010	8:11:12 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/23/2010	8:11:13 PM	Recipe started at 8:11 PM
10/23/2010	8:11:13 PM	Helium valve closed
10/23/2010	8:11:13 PM	H2 valve closed
10/23/2010	8:11:13 PM	BCl3 valve closed
10/23/2010	8:11:13 PM	PH3 valve closed
10/23/2010	8:11:13 PM	SiCl4 pre valve closed
10/23/2010	8:11:13 PM	SiCl4 post valve closed
10/23/2010	8:11:13 PM	Main Vac valve closed
10/23/2010	8:11:13 PM	Bubbler valve closed
10/23/2010	8:11:13 PM	Bypass valve opened
10/23/2010	8:11:13 PM	Helium MFC set to  0.000000
10/23/2010	8:11:13 PM	H2 MFC set to  0.000000
10/23/2010	8:11:13 PM	BCl3 MFC set to  0.000000
10/23/2010	8:11:13 PM	PHl3 MFC set to  0.000000
10/23/2010	8:11:13 PM	SiCl4 MFC set to  0.000000
10/23/2010	8:11:13 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	8:11:13 PM	Tube furnace set to 0
10/23/2010	8:11:13 PM	Helium valve closed
10/23/2010	8:11:13 PM	H2 valve closed
10/23/2010	8:11:13 PM	BCl3 valve closed
10/23/2010	8:11:13 PM	PH3 valve closed
10/23/2010	8:11:13 PM	SiCl4 pre valve closed
10/23/2010	8:11:13 PM	SiCl4 post valve closed
10/23/2010	8:11:13 PM	Bubbler valve closed
10/23/2010	8:11:13 PM	Main Vac valve opened
10/23/2010	8:11:13 PM	Bypass valve opened
10/23/2010	8:11:13 PM	Helium MFC set to  0.000000
10/23/2010	8:11:13 PM	H2 MFC set to  0.000000
10/23/2010	8:11:13 PM	BCl3 MFC set to  0.000000
10/23/2010	8:11:13 PM	PHl3 MFC set to  0.000000
10/23/2010	8:11:13 PM	SiCl4 MFC set to  0.000000
10/23/2010	8:11:13 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	8:11:13 PM	Tube furnace set to 0
10/23/2010	8:11:14 PM	Run finished at 8:11 PM
10/23/2010	8:11:14 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/23/2010	8:11:59 PM	Helium MFC set to  100.000000
10/23/2010	8:12:01 PM	Helium valve opened
10/23/2010	8:14:34 PM	Helium valve closed
10/23/2010	8:14:34 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/23/2010	8:14:35 PM	Recipe started at 8:14 PM
10/23/2010	8:14:35 PM	Helium valve closed
10/23/2010	8:14:35 PM	H2 valve closed
10/23/2010	8:14:35 PM	BCl3 valve closed
10/23/2010	8:14:35 PM	PH3 valve closed
10/23/2010	8:14:35 PM	SiCl4 pre valve closed
10/23/2010	8:14:35 PM	SiCl4 post valve closed
10/23/2010	8:14:35 PM	Main Vac valve closed
10/23/2010	8:14:35 PM	Bubbler valve closed
10/23/2010	8:14:35 PM	Bypass valve opened
10/23/2010	8:14:35 PM	Helium MFC set to  0.000000
10/23/2010	8:14:35 PM	H2 MFC set to  0.000000
10/23/2010	8:14:35 PM	BCl3 MFC set to  0.000000
10/23/2010	8:14:35 PM	PHl3 MFC set to  0.000000
10/23/2010	8:14:35 PM	SiCl4 MFC set to  0.000000
10/23/2010	8:14:35 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	8:14:35 PM	Tube furnace set to 0
10/23/2010	8:14:36 PM	Helium valve closed
10/23/2010	8:14:36 PM	H2 valve closed
10/23/2010	8:14:36 PM	BCl3 valve closed
10/23/2010	8:14:36 PM	PH3 valve closed
10/23/2010	8:14:36 PM	SiCl4 pre valve closed
10/23/2010	8:14:36 PM	SiCl4 post valve closed
10/23/2010	8:14:36 PM	Bubbler valve closed
10/23/2010	8:14:36 PM	Main Vac valve opened
10/23/2010	8:14:36 PM	Bypass valve opened
10/23/2010	8:14:36 PM	Helium MFC set to  0.000000
10/23/2010	8:14:36 PM	H2 MFC set to  0.000000
10/23/2010	8:14:36 PM	BCl3 MFC set to  0.000000
10/23/2010	8:14:36 PM	PHl3 MFC set to  0.000000
10/23/2010	8:14:36 PM	SiCl4 MFC set to  0.000000
10/23/2010	8:14:36 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	8:14:36 PM	Tube furnace set to 0
10/23/2010	8:14:36 PM	Run finished at 8:14 PM
10/23/2010	8:14:36 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/23/2010	8:15:21 PM	Recipe started at 8:15 PM
10/23/2010	8:15:21 PM	Helium valve closed
10/23/2010	8:15:21 PM	BCl3 valve closed
10/23/2010	8:15:21 PM	PH3 valve closed
10/23/2010	8:15:21 PM	SiCl4 pre valve closed
10/23/2010	8:15:21 PM	SiCl4 post valve closed
10/23/2010	8:15:21 PM	Main Vac valve closed
10/23/2010	8:15:21 PM	Bypass valve closed
10/23/2010	8:15:21 PM	Bubbler valve closed
10/23/2010	8:15:21 PM	H2 valve opened
10/23/2010	8:15:21 PM	Helium MFC set to  0.000000
10/23/2010	8:15:21 PM	H2 MFC set to  500.000000
10/23/2010	8:15:21 PM	BCl3 MFC set to  0.000000
10/23/2010	8:15:21 PM	PHl3 MFC set to  0.000000
10/23/2010	8:15:21 PM	SiCl4 MFC set to  0.000000
10/23/2010	8:15:21 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	8:15:21 PM	Tube furnace set to 1000
10/23/2010	8:16:39 PM	Helium valve closed
10/23/2010	8:16:39 PM	BCl3 valve closed
10/23/2010	8:16:39 PM	PH3 valve closed
10/23/2010	8:16:39 PM	SiCl4 pre valve closed
10/23/2010	8:16:39 PM	SiCl4 post valve closed
10/23/2010	8:16:39 PM	Main Vac valve closed
10/23/2010	8:16:39 PM	Bypass valve closed
10/23/2010	8:16:39 PM	H2 valve opened
10/23/2010	8:16:39 PM	Bubbler valve opened
10/23/2010	8:16:39 PM	Helium MFC set to  0.000000
10/23/2010	8:16:39 PM	H2 MFC set to  500.000000
10/23/2010	8:16:39 PM	BCl3 MFC set to  0.000000
10/23/2010	8:16:39 PM	PHl3 MFC set to  0.000000
10/23/2010	8:16:39 PM	SiCl4 MFC set to  0.000000
10/23/2010	8:16:39 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	8:16:39 PM	Tube furnace set to 1000
10/23/2010	8:36:39 PM	Helium valve closed
10/23/2010	8:36:39 PM	PH3 valve closed
10/23/2010	8:36:39 PM	Main Vac valve closed
10/23/2010	8:36:39 PM	Bypass valve closed
10/23/2010	8:36:39 PM	H2 valve opened
10/23/2010	8:36:39 PM	BCl3 valve opened
10/23/2010	8:36:39 PM	SiCl4 pre valve opened
10/23/2010	8:36:39 PM	SiCl4 post valve opened
10/23/2010	8:36:39 PM	Bubbler valve opened
10/23/2010	8:36:39 PM	Helium MFC set to  0.000000
10/23/2010	8:36:39 PM	H2 MFC set to  500.000000
10/23/2010	8:36:39 PM	BCl3 MFC set to  12.000000
10/23/2010	8:36:39 PM	PHl3 MFC set to  0.000000
10/23/2010	8:36:39 PM	SiCl4 MFC set to  50.000000
10/23/2010	8:36:39 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	8:36:39 PM	Tube furnace set to 1000
10/23/2010	8:49:59 PM	Helium valve closed
10/23/2010	8:49:59 PM	BCl3 valve closed
10/23/2010	8:49:59 PM	PH3 valve closed
10/23/2010	8:49:59 PM	SiCl4 pre valve closed
10/23/2010	8:49:59 PM	SiCl4 post valve closed
10/23/2010	8:49:59 PM	Main Vac valve closed
10/23/2010	8:49:59 PM	Bypass valve closed
10/23/2010	8:49:59 PM	H2 valve opened
10/23/2010	8:49:59 PM	Bubbler valve opened
10/23/2010	8:49:59 PM	Helium MFC set to  0.000000
10/23/2010	8:49:59 PM	H2 MFC set to  500.000000
10/23/2010	8:49:59 PM	BCl3 MFC set to  0.000000
10/23/2010	8:49:59 PM	PHl3 MFC set to  0.000000
10/23/2010	8:49:59 PM	SiCl4 MFC set to  0.000000
10/23/2010	8:49:59 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	8:50:00 PM	Tube furnace set to 750
10/23/2010	9:10:00 PM	H2 valve closed
10/23/2010	9:10:00 PM	BCl3 valve closed
10/23/2010	9:10:00 PM	PH3 valve closed
10/23/2010	9:10:00 PM	SiCl4 pre valve closed
10/23/2010	9:10:00 PM	SiCl4 post valve closed
10/23/2010	9:10:00 PM	Main Vac valve closed
10/23/2010	9:10:00 PM	Bypass valve closed
10/23/2010	9:10:00 PM	Helium valve opened
10/23/2010	9:10:00 PM	Bubbler valve opened
10/23/2010	9:10:00 PM	Helium MFC set to  500.000000
10/23/2010	9:10:00 PM	H2 MFC set to  0.000000
10/23/2010	9:10:00 PM	BCl3 MFC set to  0.000000
10/23/2010	9:10:00 PM	PHl3 MFC set to  0.000000
10/23/2010	9:10:00 PM	SiCl4 MFC set to  0.000000
10/23/2010	9:10:00 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	9:10:00 PM	Tube furnace set to 0
10/23/2010	9:17:38 PM	Run aborted at 9:17 PM
10/23/2010	9:17:38 PM	Helium valve closed
10/23/2010	9:17:38 PM	H2 valve closed
10/23/2010	9:17:38 PM	BCl3 valve closed
10/23/2010	9:17:38 PM	PH3 valve closed
10/23/2010	9:17:38 PM	SiCl4 pre valve closed
10/23/2010	9:17:38 PM	SiCl4 post valve closed
10/23/2010	9:17:38 PM	Bypass valve closed
10/23/2010	9:17:38 PM	Main Vac valve closed
10/23/2010	9:17:38 PM	Bubbler valve closed
10/23/2010	9:17:38 PM	Helium MFC set to  0.000000
10/23/2010	9:17:38 PM	H2 MFC set to  0.000000
10/23/2010	9:17:38 PM	BCl3 MFC set to  0.000000
10/23/2010	9:17:38 PM	PHl3 MFC set to  0.000000
10/23/2010	9:17:38 PM	SiCl4 MFC set to  0.000000
10/23/2010	9:17:38 PM	Tube furnace set to 0
10/23/2010	9:17:40 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/23/2010	9:17:41 PM	Recipe started at 9:17 PM
10/23/2010	9:17:41 PM	H2 valve closed
10/23/2010	9:17:41 PM	BCl3 valve closed
10/23/2010	9:17:41 PM	PH3 valve closed
10/23/2010	9:17:41 PM	SiCl4 pre valve closed
10/23/2010	9:17:41 PM	SiCl4 post valve closed
10/23/2010	9:17:41 PM	Main Vac valve closed
10/23/2010	9:17:41 PM	Bypass valve closed
10/23/2010	9:17:41 PM	Bubbler valve closed
10/23/2010	9:17:41 PM	Helium valve opened
10/23/2010	9:17:41 PM	Helium MFC set to  500.000000
10/23/2010	9:17:41 PM	H2 MFC set to  0.000000
10/23/2010	9:17:41 PM	BCl3 MFC set to  0.000000
10/23/2010	9:17:41 PM	PHl3 MFC set to  0.000000
10/23/2010	9:17:41 PM	SiCl4 MFC set to  0.000000
10/23/2010	9:17:41 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	9:17:41 PM	Tube furnace set to 0
10/23/2010	9:17:42 PM	Run aborted at 9:17 PM
10/23/2010	9:17:42 PM	Helium valve closed
10/23/2010	9:17:42 PM	H2 valve closed
10/23/2010	9:17:42 PM	BCl3 valve closed
10/23/2010	9:17:42 PM	PH3 valve closed
10/23/2010	9:17:42 PM	SiCl4 pre valve closed
10/23/2010	9:17:42 PM	SiCl4 post valve closed
10/23/2010	9:17:42 PM	Bypass valve closed
10/23/2010	9:17:42 PM	Main Vac valve closed
10/23/2010	9:17:42 PM	Bubbler valve closed
10/23/2010	9:17:42 PM	Helium MFC set to  0.000000
10/23/2010	9:17:42 PM	H2 MFC set to  0.000000
10/23/2010	9:17:42 PM	BCl3 MFC set to  0.000000
10/23/2010	9:17:42 PM	PHl3 MFC set to  0.000000
10/23/2010	9:17:42 PM	SiCl4 MFC set to  0.000000
10/23/2010	9:17:42 PM	Tube furnace set to 0
10/23/2010	9:17:42 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/23/2010	9:22:09 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/23/2010	9:22:10 PM	Recipe started at 9:22 PM
10/23/2010	9:22:10 PM	Helium valve closed
10/23/2010	9:22:10 PM	H2 valve closed
10/23/2010	9:22:10 PM	BCl3 valve closed
10/23/2010	9:22:10 PM	PH3 valve closed
10/23/2010	9:22:10 PM	SiCl4 pre valve closed
10/23/2010	9:22:10 PM	SiCl4 post valve closed
10/23/2010	9:22:10 PM	Main Vac valve closed
10/23/2010	9:22:10 PM	Bubbler valve closed
10/23/2010	9:22:10 PM	Bypass valve opened
10/23/2010	9:22:10 PM	Helium MFC set to  0.000000
10/23/2010	9:22:10 PM	H2 MFC set to  0.000000
10/23/2010	9:22:10 PM	BCl3 MFC set to  0.000000
10/23/2010	9:22:10 PM	PHl3 MFC set to  0.000000
10/23/2010	9:22:10 PM	SiCl4 MFC set to  0.000000
10/23/2010	9:22:10 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	9:22:10 PM	Tube furnace set to 0
10/23/2010	9:23:00 PM	Helium valve closed
10/23/2010	9:23:00 PM	H2 valve closed
10/23/2010	9:23:00 PM	BCl3 valve closed
10/23/2010	9:23:00 PM	PH3 valve closed
10/23/2010	9:23:00 PM	SiCl4 pre valve closed
10/23/2010	9:23:00 PM	SiCl4 post valve closed
10/23/2010	9:23:00 PM	Bubbler valve closed
10/23/2010	9:23:00 PM	Main Vac valve opened
10/23/2010	9:23:00 PM	Bypass valve opened
10/23/2010	9:23:00 PM	Helium MFC set to  0.000000
10/23/2010	9:23:00 PM	H2 MFC set to  0.000000
10/23/2010	9:23:00 PM	BCl3 MFC set to  0.000000
10/23/2010	9:23:00 PM	PHl3 MFC set to  0.000000
10/23/2010	9:23:00 PM	SiCl4 MFC set to  0.000000
10/23/2010	9:23:00 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	9:23:00 PM	Tube furnace set to 0
10/23/2010	9:23:01 PM	Run finished at 9:23 PM
10/23/2010	9:23:01 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/23/2010	9:24:26 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/23/2010	9:24:38 PM	Recipe started at 9:24 PM
10/23/2010	9:24:38 PM	Helium valve closed
10/23/2010	9:24:38 PM	H2 valve closed
10/23/2010	9:24:38 PM	BCl3 valve closed
10/23/2010	9:24:38 PM	PH3 valve closed
10/23/2010	9:24:38 PM	SiCl4 pre valve closed
10/23/2010	9:24:38 PM	SiCl4 post valve closed
10/23/2010	9:24:38 PM	Main Vac valve closed
10/23/2010	9:24:38 PM	Bubbler valve closed
10/23/2010	9:24:38 PM	Bypass valve opened
10/23/2010	9:24:38 PM	Helium MFC set to  0.000000
10/23/2010	9:24:38 PM	H2 MFC set to  0.000000
10/23/2010	9:24:38 PM	BCl3 MFC set to  0.000000
10/23/2010	9:24:38 PM	PHl3 MFC set to  0.000000
10/23/2010	9:24:38 PM	SiCl4 MFC set to  0.000000
10/23/2010	9:24:38 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	9:24:38 PM	Tube furnace set to 0
10/23/2010	9:24:39 PM	Helium valve closed
10/23/2010	9:24:39 PM	H2 valve closed
10/23/2010	9:24:39 PM	BCl3 valve closed
10/23/2010	9:24:39 PM	PH3 valve closed
10/23/2010	9:24:39 PM	SiCl4 pre valve closed
10/23/2010	9:24:39 PM	SiCl4 post valve closed
10/23/2010	9:24:39 PM	Bubbler valve closed
10/23/2010	9:24:39 PM	Main Vac valve opened
10/23/2010	9:24:39 PM	Bypass valve opened
10/23/2010	9:24:39 PM	Helium MFC set to  0.000000
10/23/2010	9:24:39 PM	H2 MFC set to  0.000000
10/23/2010	9:24:39 PM	BCl3 MFC set to  0.000000
10/23/2010	9:24:39 PM	PHl3 MFC set to  0.000000
10/23/2010	9:24:39 PM	SiCl4 MFC set to  0.000000
10/23/2010	9:24:39 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	9:24:39 PM	Tube furnace set to 0
10/23/2010	9:25:39 PM	H2 valve closed
10/23/2010	9:25:39 PM	BCl3 valve closed
10/23/2010	9:25:39 PM	PH3 valve closed
10/23/2010	9:25:39 PM	SiCl4 pre valve closed
10/23/2010	9:25:39 PM	SiCl4 post valve closed
10/23/2010	9:25:39 PM	Bubbler valve closed
10/23/2010	9:25:39 PM	Helium valve opened
10/23/2010	9:25:39 PM	Main Vac valve opened
10/23/2010	9:25:39 PM	Bypass valve opened
10/23/2010	9:25:39 PM	Helium MFC set to  100.000000
10/23/2010	9:25:39 PM	H2 MFC set to  0.000000
10/23/2010	9:25:39 PM	BCl3 MFC set to  0.000000
10/23/2010	9:25:39 PM	PHl3 MFC set to  0.000000
10/23/2010	9:25:39 PM	SiCl4 MFC set to  0.000000
10/23/2010	9:25:39 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	9:25:39 PM	Tube furnace set to 0
10/23/2010	9:26:39 PM	Helium valve closed
10/23/2010	9:26:39 PM	H2 valve closed
10/23/2010	9:26:39 PM	BCl3 valve closed
10/23/2010	9:26:39 PM	PH3 valve closed
10/23/2010	9:26:39 PM	SiCl4 pre valve closed
10/23/2010	9:26:39 PM	SiCl4 post valve closed
10/23/2010	9:26:39 PM	Bubbler valve closed
10/23/2010	9:26:39 PM	Main Vac valve opened
10/23/2010	9:26:39 PM	Bypass valve opened
10/23/2010	9:26:39 PM	Helium MFC set to  0.000000
10/23/2010	9:26:39 PM	H2 MFC set to  0.000000
10/23/2010	9:26:39 PM	BCl3 MFC set to  0.000000
10/23/2010	9:26:39 PM	PHl3 MFC set to  0.000000
10/23/2010	9:26:39 PM	SiCl4 MFC set to  0.000000
10/23/2010	9:26:39 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	9:26:39 PM	Tube furnace set to 0
10/23/2010	9:27:39 PM	H2 valve closed
10/23/2010	9:27:39 PM	BCl3 valve closed
10/23/2010	9:27:39 PM	PH3 valve closed
10/23/2010	9:27:39 PM	SiCl4 pre valve closed
10/23/2010	9:27:39 PM	SiCl4 post valve closed
10/23/2010	9:27:39 PM	Bubbler valve closed
10/23/2010	9:27:39 PM	Helium valve opened
10/23/2010	9:27:39 PM	Main Vac valve opened
10/23/2010	9:27:39 PM	Bypass valve opened
10/23/2010	9:27:39 PM	Helium MFC set to  100.000000
10/23/2010	9:27:39 PM	H2 MFC set to  0.000000
10/23/2010	9:27:39 PM	BCl3 MFC set to  0.000000
10/23/2010	9:27:39 PM	PHl3 MFC set to  0.000000
10/23/2010	9:27:39 PM	SiCl4 MFC set to  0.000000
10/23/2010	9:27:39 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	9:27:39 PM	Tube furnace set to 0
10/23/2010	9:28:39 PM	Helium valve closed
10/23/2010	9:28:39 PM	H2 valve closed
10/23/2010	9:28:39 PM	BCl3 valve closed
10/23/2010	9:28:39 PM	PH3 valve closed
10/23/2010	9:28:39 PM	SiCl4 pre valve closed
10/23/2010	9:28:39 PM	SiCl4 post valve closed
10/23/2010	9:28:39 PM	Bubbler valve closed
10/23/2010	9:28:39 PM	Main Vac valve opened
10/23/2010	9:28:39 PM	Bypass valve opened
10/23/2010	9:28:39 PM	Helium MFC set to  0.000000
10/23/2010	9:28:39 PM	H2 MFC set to  0.000000
10/23/2010	9:28:39 PM	BCl3 MFC set to  0.000000
10/23/2010	9:28:39 PM	PHl3 MFC set to  0.000000
10/23/2010	9:28:39 PM	SiCl4 MFC set to  0.000000
10/23/2010	9:28:39 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	9:28:39 PM	Tube furnace set to 0
10/23/2010	9:29:39 PM	H2 valve closed
10/23/2010	9:29:39 PM	BCl3 valve closed
10/23/2010	9:29:39 PM	PH3 valve closed
10/23/2010	9:29:39 PM	SiCl4 pre valve closed
10/23/2010	9:29:39 PM	SiCl4 post valve closed
10/23/2010	9:29:39 PM	Bubbler valve closed
10/23/2010	9:29:39 PM	Helium valve opened
10/23/2010	9:29:39 PM	Main Vac valve opened
10/23/2010	9:29:39 PM	Bypass valve opened
10/23/2010	9:29:40 PM	Helium MFC set to  100.000000
10/23/2010	9:29:40 PM	H2 MFC set to  0.000000
10/23/2010	9:29:40 PM	BCl3 MFC set to  0.000000
10/23/2010	9:29:40 PM	PHl3 MFC set to  0.000000
10/23/2010	9:29:40 PM	SiCl4 MFC set to  0.000000
10/23/2010	9:29:40 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	9:29:40 PM	Tube furnace set to 0
10/23/2010	9:30:40 PM	Helium valve closed
10/23/2010	9:30:40 PM	H2 valve closed
10/23/2010	9:30:40 PM	BCl3 valve closed
10/23/2010	9:30:40 PM	PH3 valve closed
10/23/2010	9:30:40 PM	SiCl4 pre valve closed
10/23/2010	9:30:40 PM	SiCl4 post valve closed
10/23/2010	9:30:40 PM	Bubbler valve closed
10/23/2010	9:30:40 PM	Main Vac valve opened
10/23/2010	9:30:40 PM	Bypass valve opened
10/23/2010	9:30:40 PM	Helium MFC set to  0.000000
10/23/2010	9:30:40 PM	H2 MFC set to  0.000000
10/23/2010	9:30:40 PM	BCl3 MFC set to  0.000000
10/23/2010	9:30:40 PM	PHl3 MFC set to  0.000000
10/23/2010	9:30:40 PM	SiCl4 MFC set to  0.000000
10/23/2010	9:30:40 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	9:30:40 PM	Tube furnace set to 0
10/23/2010	9:31:40 PM	H2 valve closed
10/23/2010	9:31:40 PM	BCl3 valve closed
10/23/2010	9:31:40 PM	PH3 valve closed
10/23/2010	9:31:40 PM	SiCl4 pre valve closed
10/23/2010	9:31:40 PM	SiCl4 post valve closed
10/23/2010	9:31:40 PM	Bubbler valve closed
10/23/2010	9:31:40 PM	Helium valve opened
10/23/2010	9:31:40 PM	Main Vac valve opened
10/23/2010	9:31:40 PM	Bypass valve opened
10/23/2010	9:31:40 PM	Helium MFC set to  100.000000
10/23/2010	9:31:40 PM	H2 MFC set to  0.000000
10/23/2010	9:31:40 PM	BCl3 MFC set to  0.000000
10/23/2010	9:31:40 PM	PHl3 MFC set to  0.000000
10/23/2010	9:31:40 PM	SiCl4 MFC set to  0.000000
10/23/2010	9:31:40 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	9:31:40 PM	Tube furnace set to 0
10/23/2010	9:32:36 PM	Run aborted at 9:32 PM
10/23/2010	9:32:36 PM	Helium valve closed
10/23/2010	9:32:36 PM	H2 valve closed
10/23/2010	9:32:36 PM	BCl3 valve closed
10/23/2010	9:32:36 PM	PH3 valve closed
10/23/2010	9:32:36 PM	SiCl4 pre valve closed
10/23/2010	9:32:36 PM	SiCl4 post valve closed
10/23/2010	9:32:36 PM	Bypass valve closed
10/23/2010	9:32:36 PM	Main Vac valve closed
10/23/2010	9:32:36 PM	Bubbler valve closed
10/23/2010	9:32:36 PM	Helium MFC set to  0.000000
10/23/2010	9:32:36 PM	H2 MFC set to  0.000000
10/23/2010	9:32:36 PM	BCl3 MFC set to  0.000000
10/23/2010	9:32:36 PM	PHl3 MFC set to  0.000000
10/23/2010	9:32:36 PM	SiCl4 MFC set to  0.000000
10/23/2010	9:32:36 PM	Tube furnace set to 0
10/23/2010	9:32:36 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/23/2010	9:32:37 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/23/2010	9:32:38 PM	Recipe started at 9:32 PM
10/23/2010	9:32:38 PM	Helium valve closed
10/23/2010	9:32:38 PM	H2 valve closed
10/23/2010	9:32:38 PM	BCl3 valve closed
10/23/2010	9:32:38 PM	PH3 valve closed
10/23/2010	9:32:38 PM	SiCl4 pre valve closed
10/23/2010	9:32:38 PM	SiCl4 post valve closed
10/23/2010	9:32:38 PM	Main Vac valve closed
10/23/2010	9:32:38 PM	Bubbler valve closed
10/23/2010	9:32:38 PM	Bypass valve opened
10/23/2010	9:32:38 PM	Helium MFC set to  0.000000
10/23/2010	9:32:38 PM	H2 MFC set to  0.000000
10/23/2010	9:32:38 PM	BCl3 MFC set to  0.000000
10/23/2010	9:32:38 PM	PHl3 MFC set to  0.000000
10/23/2010	9:32:38 PM	SiCl4 MFC set to  0.000000
10/23/2010	9:32:38 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	9:32:38 PM	Tube furnace set to 0
10/23/2010	9:32:38 PM	Helium valve closed
10/23/2010	9:32:38 PM	H2 valve closed
10/23/2010	9:32:38 PM	BCl3 valve closed
10/23/2010	9:32:38 PM	PH3 valve closed
10/23/2010	9:32:38 PM	SiCl4 pre valve closed
10/23/2010	9:32:38 PM	SiCl4 post valve closed
10/23/2010	9:32:38 PM	Bubbler valve closed
10/23/2010	9:32:38 PM	Main Vac valve opened
10/23/2010	9:32:38 PM	Bypass valve opened
10/23/2010	9:32:38 PM	Helium MFC set to  0.000000
10/23/2010	9:32:38 PM	H2 MFC set to  0.000000
10/23/2010	9:32:38 PM	BCl3 MFC set to  0.000000
10/23/2010	9:32:38 PM	PHl3 MFC set to  0.000000
10/23/2010	9:32:38 PM	SiCl4 MFC set to  0.000000
10/23/2010	9:32:38 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	9:32:38 PM	Tube furnace set to 0
10/23/2010	9:32:38 PM	Run finished at 9:32 PM
10/23/2010	9:32:38 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/23/2010	9:38:55 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/23/2010	9:38:56 PM	Recipe started at 9:38 PM
10/23/2010	9:38:56 PM	Helium valve closed
10/23/2010	9:38:56 PM	H2 valve closed
10/23/2010	9:38:56 PM	BCl3 valve closed
10/23/2010	9:38:56 PM	PH3 valve closed
10/23/2010	9:38:56 PM	SiCl4 pre valve closed
10/23/2010	9:38:56 PM	SiCl4 post valve closed
10/23/2010	9:38:56 PM	Main Vac valve closed
10/23/2010	9:38:56 PM	Bubbler valve closed
10/23/2010	9:38:56 PM	Bypass valve opened
10/23/2010	9:38:56 PM	Helium MFC set to  0.000000
10/23/2010	9:38:56 PM	H2 MFC set to  0.000000
10/23/2010	9:38:56 PM	BCl3 MFC set to  0.000000
10/23/2010	9:38:56 PM	PHl3 MFC set to  0.000000
10/23/2010	9:38:56 PM	SiCl4 MFC set to  0.000000
10/23/2010	9:38:56 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	9:38:56 PM	Tube furnace set to 0
10/23/2010	9:38:56 PM	Helium valve closed
10/23/2010	9:38:56 PM	H2 valve closed
10/23/2010	9:38:56 PM	BCl3 valve closed
10/23/2010	9:38:56 PM	PH3 valve closed
10/23/2010	9:38:56 PM	SiCl4 pre valve closed
10/23/2010	9:38:56 PM	SiCl4 post valve closed
10/23/2010	9:38:56 PM	Bubbler valve closed
10/23/2010	9:38:56 PM	Main Vac valve opened
10/23/2010	9:38:56 PM	Bypass valve opened
10/23/2010	9:38:56 PM	Helium MFC set to  0.000000
10/23/2010	9:38:56 PM	H2 MFC set to  0.000000
10/23/2010	9:38:56 PM	BCl3 MFC set to  0.000000
10/23/2010	9:38:56 PM	PHl3 MFC set to  0.000000
10/23/2010	9:38:56 PM	SiCl4 MFC set to  0.000000
10/23/2010	9:38:56 PM	Bypass solenoid MFC set to  0.000000
10/23/2010	9:38:56 PM	Tube furnace set to 0
10/23/2010	9:38:57 PM	Run finished at 9:38 PM
10/23/2010	9:38:57 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
